Installation Report

DVIA-M Series

07-30-2019

South China University of Technology Hitachi Regulus 8100 DVIA-MB1000 — MB1000 P121 China trip — 2019.07.30

DVIA-M Series

Installation Report

South China University of Technology

Hitachi Regulus 8100

SEM

DVIA-MB1000

MB1000

P121

Equipment picture

Target equipment

Hitachi Regulus 8100

Place of installation

South China University of Technology F1

Remark

Good Performance

END USER

South China University of Technology

Operator / Date of business trip

Choi, Sung Won / 19.07.24

Date of reporting

19.07.30

Summary of installation results

Condition	Test Direction	Base	Top
ACTIVE	Z	D	F
	X	D	E
	Y	D	G

Good omnidirectional performance.

Vibration stays low—and the criterion is met—but imaging behaviour is marginal, so microscope checkout continues.

MB1000 internal program performance measurement result

Z axis

X axis

Y axis

Vibration environment measurement results

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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