Installation Report
DVIA-M Series
07-02-2017
Shanghai Institute of Materials Research ZEISS Gemini 500 DVIA-MB1000 (P64) Installation Worksheet — 2017.07.02
DVIA-M Series
Installation Report
Shanghai
ZEISS
Gemini 500
DVIA-MB1000
MB1000
P64
Contents
(MB1000 P64 Set up)
China business trip worksheet (MB1000 P64 set-up).
Target equipment
| Target equipment | ZEISS Gemini500 |
|---|---|
| Place of installation | Shanghai, China |
| Remark | Good performance |
| END USER | Shanghai institute of material research |
Trip and report schedule
| Operator: Choi, Sungwon | Date of business trip: 17.06.29 |
|---|---|
| Date of reporting: 17.07.02 |
Installation result summary
| Test Direction | Base | Top | ACTIVE |
|---|---|---|---|
| Z | B | N/A | F |
| X | E | N/A | G |
| Y | E | N/A | G |
Omnidirectional performance is good.
On the floor, the vibration environment was measured as vertical axis B Class, X axis E Class, and Y axis E Class; vibration near 10 Hz is relatively large.
With active control, the vibration environment on the isolator top plate is Z axis F Class, X axis G Class, and Y axis G Class — performance is good.
Equipment imagery could not be verified because the microscope setup was not complete.
MB1000 internal program performance measurement result
Z axis (internal program)
X axis (internal program)
Y axis (internal program)
Vibration environment measurement results
Z axis (vibration environment)
X axis (vibration environment)
Y axis (vibration environment)
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date07-02-2017
Tags
DVIA-M Series
Installation Report
Shanghai
ZEISS
Gemini 500
DVIA-MB1000
MB1000
P64
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