East China University of Science and Technology ZEISS Gemini 500 DVIA-MB1000 (P63) China trip report — 2018.05.14

DVIA-M Series

Installation Report

East China University of Science and Technology

ECUST

ZEISS

Gemini 500

DVIA-MB1000

P63

Shanghai

China

China business trip report (MB1000_P63 Set up)

Target equipment

ZEISS Gemini500

Place of installation

중국 상해

Remark

Good performance

END USER

East China University of Science and Technology

Trip reporter

출장자 : 최성원

Date of business trip

출장일 : 17.05.09

Date of report

작성일 : 17.05.14

작성일 : 18.05.14

Summary of installation results

VC-Class summary grid (as issued)

Good performance in all directions.

The floor vibration environment was measured as D Class on the vertical axis, E Class on the X axis, and E Class on the Y axis; low-frequency vibration near 2.5 Hz is relatively large.

With active control, the vibration environment on the isolator top plate is G Class on the Z axis, G Class on the X axis, and G Class on the Y axis, indicating favorable performance.

Equipment imagery could not be confirmed because microscope setup was not completed.