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Installation Report
DVIA-M Series
06-18-2018

Fudan University configuration report — DVIA MC1000 / MC3000 / MB1000 active-mount vibration checks (2018-06-13–14)

DVIA-M Series
Installation Report
Fudan University
Configuration Report
MC1000
MC3000
MB1000
2018

Contents

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date

2018.06.13~14

Operator

Daeil System, Manager Sung Won Choi

Place of measurement

F1/B1 Floor, Fudan University

Equipment Model

MC3000(171025R1): FEI Tecnai G2-F20

MC1000(171114R5): Bruker Ascend400

MC1000(171205R1): Bruker Ascend400 WB

MC1000(171205R2): Bruker Ascend400

MC1000(171205R3): Oxford AS400

MC1000(171205R5): Bruker Ultrashield500

MB1000(171023R1): FEI Nova NanoSEM450

MB1000(171023R3): Hitachi HT7700

MB1000(171023R5): Bruker APEX DUO X-ray

MB1000(171027R2): Bruker D8 venture

Measurement conditions and results

Measurement conditions

All equipment is running

Vibration measured at corner of top plate of the isolation platform

Summary of measurement results

Refer to next page

1) MC3000 - 171025R1

Model and S/N

MC3000 - 171025R1

Target equipment

FEI Tecnai G2 F-20

Location

Fudan university B1

Photo

Performance

Test DirectionVC-ClassBaseTopActive
ZEG
XEG
YEG

Performance of active isolator is good

There is direct disturbance at 30Hz, but it is not severe.

Transmissibility Z

Transmissibility X

Transmissibility Y

1/3 Octave-band graph Z

1/3 Octave-band graph X

1/3 Octave-band graph Y

2) MC1000 - 171025R1

Model and S/N

MC3000 - 171114R5

Target equipment

Bruker Ascend400

Location

Fudan university B1

Photo

Performance

Test DirectionVC-ClassBaseTopActive
ZEF
XFF
YEG

Performance of active isolator is good

Transmissibility Z

Transmissibility X

Transmissibility Y

1/3 Octave-band graph Z

1/3 Octave-band graph X

1/3 Octave-band graph Y

3) MC3000 - 171025R1

Model and S/N

MC1000 - 171205R1

Target equipment

Bruker Ascend400 WB

Location

Fudan university B1

Photo

Performance

Test DirectionVC-ClassBaseTopActive
ZEG
XEG
YEG

Performance of active isolator is good

Transmissibility Z

Transmissibility X

Transmissibility Y

1/3 Octave-band graph Z

1/3 Octave-band graph X

1/3 Octave-band graph Y

4) MC1000 - 171205R2

Model and S/N

MC1000 - 171205R2

Target equipment

Bruker Ascend400

Location

Fudan university B1

Photo

Performance

Test DirectionVC-ClassBaseTopActive
ZDB
XFF
YEE

Performance of active isolator is good

There is direct disturbance at 60Hz.

Transmissibility Z

Transmissibility X

Transmissibility Y

1/3 Octave-band graph Z

1/3 Octave-band graph X

1/3 Octave-band graph Y

5) MC1000 - 171205R3

Model and S/N

MC1000 - 171205R3

Target equipment

Oxford AS400

Location

Fudan university B1

Photo

Performance

Test DirectionVC-ClassBaseTopActive
ZCG
XEG
YEG

Performance of active isolator is good

Transmissibility Z

Transmissibility X

Transmissibility Y

1/3 Octave-band graph Z

1/3 Octave-band graph X

1/3 Octave-band graph Y

6) MC1000 - 171205R5

Model and S/N

MC1000 - 171205R5

Target equipment

Bruker Ultrashield

Location

Fudan university B1

Photo

Performance

Test DirectionVC-ClassBaseTopActive
ZEG
XEG
YFG

Performance of active isolator is good

Transmissibility Z

Transmissibility X

Transmissibility Y

1/3 Octave-band graph Z

1/3 Octave-band graph X

1/3 Octave-band graph Y

7) MB3000 - 171023R1

Model and S/N

MC3000 - 171023R1

Target equipment

FEI Nova NanoSem450

Location

Fudan university B1

Photo

Performance

Test DirectionVC-ClassBaseTopActive
ZEE
XFF
YEF

Performance of active isolator is good

There is direct disturbance over 30Hz. Acoustic noise, cable, hose are

considered to be cause.

Transmissibility Z

Transmissibility X

Transmissibility Y

1/3 Octave-band graph Z

1/3 Octave-band graph X

1/3 Octave-band graph Y

8) MB1000 - 171023R3

Model and S/N

MB1000 - 171023R3

Target equipment

Hitachi HT7700

Location

Fudan university B1

Photo

Performance

Test DirectionVC-ClassBaseTopActive
ZEE
XEF
YEF

Performance of active isolator is good

There is direct disturbance over 50Hz. Acoustic noise, cable, hose are

considered to be cause.

Transmissibility Z

Transmissibility X

Transmissibility Y

1/3 Octave-band graph Z

1/3 Octave-band graph X

1/3 Octave-band graph Y

9) MB1000 - 171023R5

Model and S/N

MB1000 - 171023R5

Target equipment

Bruker APEX DUO X-ray

Location

Fudan university B1

Photo

Performance

Test DirectionVC-ClassBaseTopActive
ZED
XED
YFE

Performance of active isolator is good

There is direct disturbance at 25Hz. Some peaks observed in spectrum at

25Hz and its harmonic frequency.

Transmissibility Z

Transmissibility X

Transmissibility Y

1/3 Octave-band graph Z

1/3 Octave-band graph X

1/3 Octave-band graph Y

10) MC3000 - 171023R5

Model and S/N

MB1000 - 171023R5

Target equipment

Bruker D8 Venture

Location

Fudan university 1F

Photo

Performance

Test DirectionVC-ClassBaseTopActive
ZEA
XEB
YEB

Active isolator seems to work well, vibration level of top is not good.

Many peaks observed in vibration spectrum. The equipment appears to be

generating vibration itself.

Transmissibility Z

Transmissibility X

Transmissibility Y

1/3 Octave-band graph Z

1/3 Octave-band graph X

1/3 Octave-band graph Y

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date06-18-2018
Tags
DVIA-M Series
Installation Report
Fudan University
Configuration Report
MC1000
MC3000
MB1000
2018

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