YIMO Pudan University site — MC3000 / MC1000 / MB1000 vibration setup report (2018-01-30)
Contents
1. Overview
Under the YIMO Tech tender for 10 sets, active vibration isolation platforms were set up and vibration measurements were performed for a total of 5 sets including the MC1000 for NMR equipment:
MC3000(P6) — FEI TECNAI G2-F20
MC1000(P65) — Bruker Ascend400 (NMR)
MB1000(P57) — Hitachi HT7700
MB1000(P59) — Bruker APEX DUO x-ray
MB1000(P61) — FEI Nova NanoSEM450
2. Measurement date and site
2018-01-25 to 2018-01-26
B1 analytical laboratory, Pudan University, Shanghai, China
3. Setup and measurement personnel
DAEIL SYSTEMS, Doohyun Kim (doohyun.kim@daeilsys.com)
DAEIL SYSTEMS, Jongwook Lim (lju@daeilsys.com)
4. Measurement results
*See the following pages.*
1) MC3000(P6) - FEI TECNAI G2-F20
Model and serial number
MC3000(P6) 171025R1
Target equipment
FEI TECNAI G2-F20
Installation site
B1 analytical laboratory, Pudan University, Shanghai, China
Target equipment and installation photo
Performance summary (VC-Class)
| Test Direction | VC-Class Base (floor vibration) | VC-Class Top (isolation platform top) |
|---|---|---|
| Z-axis | D | F |
| X-axis | E | F |
| Y-axis | F | G |
Isolation performance is favorable.
Image test performed — isolation performance judged favorable.
2) MC1000(P65) - Bruker Ascend400 (NMR)
Model and serial number
MC1000(P65) 171114R5
Target equipment
Bruker Ascend400 (NMR)
Installation site
B1 analytical laboratory, Pudan University, Shanghai, China
Target equipment and installation photo
Performance summary (VC-Class)
| Test Direction | VC-Class Base (floor vibration) | VC-Class Top (isolation platform top) |
|---|---|---|
| Z-axis | E | F |
| X-axis | F | F |
| Y-axis | E | G |
Isolation performance is favorable.
For the target equipment, only the product is placed on the platform and drive/setup is not completed; re-measurement is required after the target equipment is fully set up.
UI program — measurement results
Z-axis
X-axis
Y-axis
Vibration environment — measurement results
Z-axis
X-axis
Y-axis
3) MB1000(P57) - Hitachi HT7700
Model and serial number
MB1000(P57) 171023R3
Target equipment
Hitachi HT7700
Installation site
B1 analytical laboratory, Pudan University, Shanghai, China
Target equipment and installation photo
Performance summary (VC-Class)
| Test Direction | VC-Class Base (floor vibration) | VC-Class Top (isolation platform top) |
|---|---|---|
| Z-axis | D | D |
| X-axis | F | D |
| Y-axis | E | F |
Overall isolation performance is excellent; however, through the equipment or cables connected to the equipment, high levels of vibration are observed on the top in the 50 Hz and 80 Hz bands.
Low-frequency band isolation performance is favorable.
UI program — measurement results
Z-axis
X-axis
Y-axis
Vibration environment — measurement results
Z-axis
X-axis
Y-axis
4) MB1000(P59) - Bruker APEX DUO X-ray
Model and serial number
MB1000(P59) 171023R5
Target equipment
Bruker APEX DUO X-ray
Installation site
B1 analytical laboratory, Pudan University, Shanghai, China
Target equipment and installation photo
Performance summary (VC-Class)
| Test Direction | VC-Class Base (floor vibration) | VC-Class Top (isolation platform top) |
|---|---|---|
| Z-axis | E | D |
| X-axis | E | E |
| Y-axis | E | D |
Active Bandwidth isolation performance is excellent; however, through the equipment or cables connected to the equipment, vibration in the form of a 25 Hz harmonic appears on the top.
Low-frequency band isolation performance is favorable.
UI program — measurement results
Z-axis
X-axis
Y-axis
Vibration environment — measurement results
Z-axis
X-axis
Y-axis
5) MB1000(P61) - FEI Nova NanoSEM450
Model and serial number
MB1000(P61) 171023R1
Target equipment
FEI Nova NanoSEM450
Installation site
B1 analytical laboratory, Pudan University, Shanghai, China
Target equipment and installation photo
Performance summary (VC-Class)
| Test Direction | VC-Class Base (floor vibration) | VC-Class Top (isolation platform top) |
|---|---|---|
| Z-axis | E | E |
| X-axis | E | G |
| Y-axis | E | F |
Overall isolation performance is excellent; however, through the equipment or cables connected to the equipment, high levels of vibration are observed on the top in the 50 Hz band.
Low-frequency band isolation performance is favorable.
UI program — measurement results
Z-axis
X-axis
Y-axis
Vibration environment — measurement results
Z-axis
X-axis
Y-axis
Reference
Generic Vibration Criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
Detail size refers to width in microelectronics fabrication or particle size in medical research.
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