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Installation Report
DVIA-M Series
04-10-2018

OXFORD AS400 NMR DVIA-MB1000/P75 (MC1000_P75) — DVIA-M Series vibration report (2018-04-10)

DVIA-M Series
DVIA-MB1000
MC1000
P75
OXFORD
AS400 NMR
Installation Report
Pudan Univ
2018

Target equipment

OXFORD AS400 NMR

Place of installation

Pudan UNIV, Basement 1FLOOR

Uniqueness

Good Performance

END USER

Pudan Univ

Date of business trip

18.03.30

Business traveler

Choi, HyoungMun

Date Created

18.04.10

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date

2018.03.30 (Friday), Rater: Daeil System, Manager Choi , Hyoung Moon

Place of measurement

Pudan UNIV, Basement 1FLOOR

Equipment Model

OXFORD AS400 NMR

Measurement conditions and results

Summary of measurement results

Test ConditionVC-Class ZVC-Class XVC-Class Y
FloorEEE
Above ActiveGGG

Good omnidirectional performance and attached VC-Class graph.

MB1000 internal program performance measurement result

VC-Class graph — Z axis

VC-Class graph — X axis

VC-Class graph — Y axis

Octave Band Result (BASE: Floor, TOP: Above Active)

Octave band — Z axis

Octave band — X axis

Octave band — Y axis

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude µm/s (µin/s)Detail Size µm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date04-10-2018
Tags
DVIA-M Series
DVIA-MB1000
MC1000
P75
OXFORD
AS400 NMR
Installation Report
Pudan Univ
2018