Installation Report
DVIA-M Series
04-10-2018
OXFORD AS400 NMR DVIA-MB1000/P75 (MC1000_P75) — DVIA-M Series vibration report (2018-04-10)
DVIA-M Series
DVIA-MB1000
MC1000
P75
OXFORD
AS400 NMR
Installation Report
Pudan Univ
2018
Contents
Target equipment
OXFORD AS400 NMR
Place of installation
Pudan UNIV, Basement 1FLOOR
Uniqueness
Good Performance
END USER
Pudan Univ
Date of business trip
18.03.30
Business traveler
Choi, HyoungMun
Date Created
18.04.10
Overview
After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.
Measurement date
2018.03.30 (Friday), Rater: Daeil System, Manager Choi , Hyoung Moon
Place of measurement
Pudan UNIV, Basement 1FLOOR
Equipment Model
OXFORD AS400 NMR
Measurement conditions and results
Summary of measurement results
| Test Condition | VC-Class Z | VC-Class X | VC-Class Y |
|---|---|---|---|
| Floor | E | E | E |
| Above Active | G | G | G |
Good omnidirectional performance and attached VC-Class graph.
MB1000 internal program performance measurement result
VC-Class graph — Z axis
VC-Class graph — X axis
VC-Class graph — Y axis
Octave Band Result (BASE: Floor, TOP: Above Active)
Octave band — Z axis
Octave band — X axis
Octave band — Y axis
Generic Vibration Criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
Detail size refers to width in microelectronics fabrication or particle size in medical research.
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date04-10-2018
Tags
DVIA-M Series
DVIA-MB1000
MC1000
P75
OXFORD
AS400 NMR
Installation Report
Pudan Univ
2018
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