FATRI-UTC ZEISS Gemini DVIA-MB1000 (MB1000 P55) Installation report — 2018.03.08

ZEISS-Gemimi

FATRI-UTC 1층 분석실 (크린룸)

제진대 성능 양호

FATRI-UTC

Operator: Choi, HyoungMun

Date of business trip : 18.03.05~18.03.07

Date of reporting : 18.03.08

After isolator installation, the vibration environment was measured to verify there is no issue using the equipment.

Measurement date: 2018.03.06 (TUE)

Operator: Daeil System, Manager Choi, HyoungMun

Place of measurement : FATRI-UTC 1층 분석실(크린룸)

Equipment Model: ZEISS-Gemimi

Measurement was performed under a general condition (SEM pump running) and under a normal condition (SEM/coater pumps running and personnel walking).

Changes such as peripheral pump operation or foot traffic had little effect on the vibration environment above the isolator.

Good omnidirectional performance.