Seohan Technology Research Institute JEOL JSM-IT500 DVIA-MB1000 (P54) Installation Report — 2018.01.02

DVIA-M Series

Installation Report

Seohan Technology Research Institute

JEOL

JSM-IT500

DVIA-MB1000

MB1000

P54

Seohan Technology Research Institute (MB1000 P54 Set up)

Target equipment photo

Target equipment	JEOL - JSM-IT500
Place of installation	Seohan Technology Research Institute, 3F analytical lab
Remark	Good isolation performance
END USER	Seohan Technology Research Institute
Operator: Choi, Hyoung Mun	Date of business trip : 18.01.02
Operator: Choi, Hyoung Mun
Date of setup : 2018.01.02
Date of reporting : 18.01.03

Overview

After installing the vibration isolation platform, the vibration environment was measured to confirm that there is no problem in using the equipment.

Measurement date

Measurement date: 2018.01.02 (Tue), measurer: Daeil Systems Manager Choi, Hyoung Mun

Operator

Operator: Daeil Systems, Manager Choi, Hyoung Mun

Place of measurement

Place of measurement: Seohan Technology Research Institute, 3F analytical lab

Equipment Model

Equipment Model: JEOL - JSM-IT500

Measurement conditions and results

N/A

Summary of measurement results

Test Condition	VC-Class Z	VC-Class X	VC-Class Y
Building floor	B	C	D
Above isolator top	E	G	G

Good omnidirectional performance; VC-Class curves are included in the plots below.

Measurements were taken under a general condition (SEM pumps running) and a routine condition (SEM/coater pumps running and people walking).

Even when nearby pumps run or people move around, the change in environment does not have a large effect on the vibration environment above the isolator.

The customer was satisfied with the performance at the time of image measurement.