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Installation Report
DVIA-M Series
12-08-2017

Hangzhou China DVIA-MB1000 (170906R4) Business Trip Report — ZIESS EVO18 Special Edition — 2017.12.08

DVIA-M Series
Installation Report
DVIA-MB1000
MB1000
170906R4
Hangzhou
China
Wangxiang
ZIESS
EVO18

Target equipment

ZIESS EVO18 Special Edition

Installation site

China Hangzhou

Notes

Installed on the 1st floor of the factory research building.

End user

Wangxiang campany (automotive parts company)

Business trip date

17.12.05

Author

임종욱

Report written date

17.12.08

Installation result summary

Test DirectionVC-ClassBaseTopACTIVE
ZA+D
XCE
YCG

Good performance in every direction.

Floor vibration is very poor, so imaging is currently difficult. A large production facility is right next to the research building, which appears to affect the site.

Factory site

The isolator performance was demonstrated at its maximum and the customer confirmed. They recognize the issue is the installation location and will coordinate internally on installation matters.

MB1000 internal program performance measurement result

Z axis (MB1000 internal program)

X axis (MB1000 internal program)

Y axis (MB1000 internal program)

Vibration environment measurement result

Z axis (vibration environment)

X axis (vibration environment)

Y axis (vibration environment)

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date12-08-2017
Tags
DVIA-M Series
Installation Report
DVIA-MB1000
MB1000
170906R4
Hangzhou
China
Wangxiang
ZIESS
EVO18