HITACHI SU8010 SEM DVIA-MB1000 (MB1000_P40) Vibration Survey — Emco Technology Korea — 2017.01.20
Contents
(MB1000_P40)
Vibration environment measurement (Incheon Songdo, Emco Technology Korea).
Target equipment: HITACHI SEM SU8010.
Target equipment
Target equipment: HITACHI SEM _ SU8010
Business trip date
2017.01.19 (Thu)
Report date
2017.01.20 (Fri)
Operators
DAEIL SYSTEMS, Lim Jong-wook (Chief)
Overview
After installing the anti-vibration platform, the vibration environment was measured to verify there is no problem using the equipment.
Measurement date
Measurement date: 2017. 01. 19 (Thu), Measurer: DAEIL SYSTEMS, Lim Jong-wook (Chief)
Measurement site
Emco Technology Korea, Incheon Songdo
Equipment model
HITACHI SEM ( SU8010 )
Measurement conditions and results
Measurement conditions: measured the top plate of the anti-vibration platform and the building floor of the research building.
Summary of measurement results
VC-Class (general condition)
| Z | X | Y | |
|---|---|---|---|
| Building floor | A | D | D |
| Platform top plate | F | G | G |
VC-Class (adverse condition)
| Z | X | Y | |
|---|---|---|---|
| Building floor | A | C | C |
| Platform top plate | E | G | F |
Performance is very favorable; VC-Class graphs are attached.
Measurements were performed under a general condition (SEM pump running) and an adverse condition (SEM/coating unit pumps running / personnel walking).
Vibration environment VC-Class plots
1. Environment condition: SEM pump on / coating pump off
Vertical axis (Z) vibration level — general test condition
Horizontal axis (X) vibration level — general test condition
Horizontal axis (Y) vibration level — general test condition
2. Environment condition: SEM pump on / coating pump on / personnel moving
Vertical axis (Z) vibration level — adverse test condition
Horizontal axis (X) vibration level — adverse test condition
Horizontal axis (Y) vibration level — adverse test condition
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