Guangzhou ENF Hitachi SEM SU8010 DVIA-MB1000 (MB1000 P35) vibration-environment report — 2016.11.11
Contents
MB1000 P35 vibration environment measurement result
(China Guangzhou ENF)
Target equipment : HITACHI SEM _ SU8010
Captured measurement worksheet (MB1000 P35)
Trip date
Date of trip: 2016-11-09 (Wed)
Report date
Report date: 2016-11-11 (Fri)
Reporting personnel
Trip participants: Deputy Manager 이양문, Supervisor 임종욱, Assistant 김성국
Overview
Following vibration-isolator installation, vibration measurements were conducted to verify that microscope operation would not be affected.
Measurement date
Measurement date: 2016-11-09 (Wed). Measured by Lim Jong-wook (Daeil Systems), Supervisor.
Measurement site
China Guangzhou ENF.
Equipment model
HITACHI SEM ( SU8010 ).
Measurement conditions and outcomes
Measurements were performed on the isolator tabletop and on the institute building floor slab.
Measurement results summary
| Test Condition | VC-Class Z | VC-Class X | VC-Class Y |
|---|---|---|---|
| Building floor | B | C | C |
| Isolator tabletop | E | E | E |
The slab under the deployed isolator was measured at Z-axis B-Class, X-axis C-Class, and Y-axis C-Class.
The isolator tabletop was measured at Z-axis E-Class, X-axis E-Class, and Y-axis E-Class.
Satisfactory behaviour was observed across all directions; VC-Class graphs follow.
Vibration environment VC-Class graphs
Vertical axis (Z) vibration level
Horizontal axis (X) vibration level
Horizontal axis (Y) vibration level
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