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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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184 case studies
Kunming Metallurgical Research Institute ZEISS Sigma 360 DVIA-ULFB700 Installation Report

Kunming Metallurgical Research Institute Co., Ltd (Kunming) ZEISS Sigma 360 FE-SEM DVIA-ULFB700 installation report — following installation of the DVIA-ULFB700, vibration measurement was performed with the equipment in the IDLE state. The Vertical axis passed on the DVIA-ULFB700 (FAIL on floor), while Left-to-Right and Front-to-Back passed on both floor and platform. Because the ZEISS Sigma 360 specification is defined in acceleration while the data was acquired in velocity, the specification was converted to an equivalent velocity criterion for the pass/fail evaluation. Per-axis Autospectrum data and an installation photo are published.

Greater Bay Area Quantum Center ZEISS Sigma 360 DVIA-ULF700 Installation Report

Greater Bay Area Quantum Center (Guangdong, China) ZEISS Sigma 360 FE-SEM DVIA-ULF700 installation report — after installation, vibration was measured with the equipment in the IDLE state and represented in Autospectrum format. On the DVIA-ULF700 platform all three axes (Vertical, Left-to-Right, Front-to-Back) passed; on the floor the Vertical and Front-to-Back axes failed while Left-to-Right passed. Per-axis Autospectrum data and an installation photo are published.

Greater Bay Area Quantum Center ZEISS Sigma 360 DVIA-ULF700 Installation Report

DVIA-ULF700 (S/N 251110R7) installation report for Greater Bay Area Quantum Center, Shenzhen, China — ZEISS FE-SEM Sigma 360. Vibration specification diagram, UI VC / Autospectrum / Transmissibility plots and equipment photo.

COXEM FX-2000 Schottky FE-SEM DVIA-ULFB700 (260423R1-2) Installation Report

DVIA-ULFB700 (serial 260423R1-2) tuning and vibration measurement at COXEM, Migun Techno World Building 1, 2nd floor, Daejeon, for a COSEM FX-2000 Schottky field emission SEM. Engineers Chaewon Lee and Kim Joohyuk (DAEIL SYSTEMS); tuning and report date May 21, 2026. Equipment installed and Turned on/IDLE. Passive and Active measurement summary tables, UI Program summary, and axis VC curves, autospectra, and transmissibility for Passive, Active, and UI Program modes. Reference VC criteria as a markdown table only.

Shenzhen BYD Lithium Battery ZEISS Sigma 360 DVIA-U1000 (250107R2) Installation Report

DVIA-U1000 (S/N 250107R2) retuning and vibration verification for a ZEISS FE-SEM Sigma 360 at Shenzhen BYD Lithium Battery, Shenzhen. Performance had degraded; after retuning the platform performs as intended (tuning May 18, 2026; report written May 21, 2026). Published vibration specification diagram, measurement summary (floor FAIL vertical / platform PASS all axes), nine-axis UI plots, and equipment photo. Decorative header banner and Reference EMF omitted — Reference uses the standard VC markdown table.

Shanghai Opotong Thermo Scientific Axia SEM DVIA-ULFB700 Installation Report

DVIA-ULFB700 (S/N 260202R1-5) installation report for Thermo Fisher Scientific SEM (Axia) at Shanghai Opotong Instruments Co., Ltd. Includes vibration-specification note graphic, VC / Autospectrum / Transmissibility plots from the UI program, equipment photo, and Reference as a VC criteria markdown table (no separate reference bitmap).