Vibration Isolation Case Studies

Installation report for the DVIA-MB1000 (S/N 161117R3) supporting a SEMIRON 5000 SEM in Lab 506 at SERON Technologies, Uiwang. A performance check was followed by vibration measurement with the equipment in the IDLE state. On the floor all three axes measured at the VC-D level, while on the DVIA-MB1000 platform the vertical (Z), left-to-right (X) and front-to-back (Y) axes all reached VC-G, so no additional re-tuning was required. Per-axis Autospectrum and VC Curves plus the installation photo are published.

Installation report for the DVIA-MB1000 (S/N 170619R2) supporting a SEMIRON 5000 SEM in Lab 506 at SERON Technologies, Uiwang. The platform was inspected and the vibration environment re-measured with the equipment in the IDLE state. On the floor all three axes sat at the VC-D level, while on the DVIA-MB1000 the vertical (Z), left-to-right (X) and front-to-back (Y) axes all reached VC-G, so the system was cleared for continued operation without any re-tuning. Per-axis Autospectrum and VC Curves plus the installation photo are published.

DVIA-ML1000 (S/N 251218R1-6) installation report for a Thermo Fisher Scientific Apreo SEM at Zhenjiang, Jiangsu, tuned on 2026.08.11. With the SEM in the Idle state, floor vibration exceeded the 1.5625 µm/s RMS specification on all axes while the isolator met the specification on all three axes.

Yidong Optics SEM DVIA-ML1000 installation report (2nd tuning trial, tuned 2026.07.17) — at the Suzhou site for end user Yidong Optics Co., Ltd., the DVIA-ML1000 active vibration isolation platform was re-tuned and measured with the equipment in the IDLE state. The floor registered VC-D vertically, VC-F left to right and VC-E front to back, while the DVIA-ML1000 platform reached VC-G on all three axes. The tuning request work order (调试请求书), per-axis Autospectrum and VC Curves plots, and the installation photo are published.

Hitachi High-Tech SU8600 FE-SEM DVIA-ML1000 installation report — following installation of the DVIA-ML1000 active vibration isolation platform at Wuxi, tuning and vibration measurement were performed with the equipment in the IDLE state. Measured against the horizontal and vertical allowable vibration specification, both the floor and the DVIA-ML1000 platform passed on the vertical, left-to-right, and front-to-back axes. The tuning request work-order form, per-axis Autospectrum plots, and the installation photo are published.

Yidon Technologies YF-1801 FE-SEM DVIA-ML1000 installation report — following installation at Suzhou for end user Yidong Optical Technology, the DVIA-ML1000 active vibration isolation platform was tuned and measured with the equipment in the IDLE state. Across the vertical, left-to-right, and front-to-back axes the DVIA-ML1000 platform reached VC-G on all three axes. The tuning request work-order form, per-axis Autospectrum and VC Curves plots, and the installation photo are published.