Installation Report

DVIA-M Series

08-11-2026

SERON Technologies SEMIRON 5000 SEM DVIA-MB1000 Installation Report

DVIA-M Series

Installation Report

SERON Technologies

SEM

SEMIRON 5000

DVIA-MB1000

161117R3

Uiwang

Overview

A performance check of the DVIA-MB1000 in Lab 506 at SERON Technologies (Uiwang) was followed by vibration measurement.

Inspection and vibration measurement were performed in the IDLE state.

The data is presented in VC Curve format, together with reference material on the corresponding vibration levels.

Vibration Isolation System Information

Model: DVIA-MB1000

Serial Number: 161117R3

Engineer

Donggyu Park, Gyumin Park · DAEIL SYSTEMS

Tuning Date

2026.08.11

Installation Site

Lab 506, SERON Technologies (Uiwang)

End User

Customer: SERON Technologies

Equipment

Manufacturer: SERON Technologies

Equipment: SEM

Model: SEMIRON 5000

Vibration Specification

N/A

Equipment Condition

IDLE

Measurement Equipment

10.1) Measurement Equipment

Hardware: B&K Front End Type 3040-A-040

Software: B&K Pulse Labshop22 Version

10.2) Accelerometer

PCB 393B05

Measurement Setup

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Conclusion

The performance check and vibration measurement of the DVIA-MB1000 (S/N: 161117R3) installed in Lab 506 at SERON Technologies confirmed that the X, Y and Z axis sensor signals and the active isolation performance are all operating stably within the normal range.

Analysing the measurement data as VC Curves, all three axes maintain excellent isolation performance at the VC-G level, so the system can be operated without any additional re-tuning.

The environment in which the platform is installed is therefore judged to be very good from a vibration standpoint, and the SERON Technologies SEM "SEMIRON 5000" is expected to deliver stable performance without being affected by external vibration.

Measurement Summary

Measurement Point	Vibration Specification	Axis	Floor	DVIA-MB1000
1. Floor 2. DVIA-MB1000	N/A	Vertical (Z-axis)	VC-D	VC-G
		Left to Right (X-axis)	VC-D	VC-G
		Front to Back (Y-axis)	VC-D	VC-G

Data and Image

Z-axis Autospectrum

Z-axis VC Curves

X-axis Autospectrum

X-axis VC Curves

Y-axis Autospectrum

Y-axis VC Curves

Installation Photo

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude (μm/s) (μin/s)	Detail Size (μm)
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.

The information in this table is provided for reference. In most cases it is advisable to seek the advice of a specialist familiar with the application and the vibration requirements of the equipment and process.