Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Ohio State University Nanotech West Lab Raith EPBG 5150 DVIA-MB3000 VEC (221130R3) Installation Report — 2023.11.30
DVIA-MB3000 (serial 221130R3, platform DVIA-MB3000 - 1800 x 1300 mm) VEC installation worksheet at Ohio State University Nanotech West Lab with Raith EPBG 5150. Form tuning date 23.11.30; UI program transmissibility (Z/X/Y) and VEC plots including floor/active VC, floor/active vibration, high-frequency transmissibility, and repeat-axis transmissibility curves per the worksheet; Reference as a markdown Generic Vibration Criteria table (no separate criterion figure). Engineer Youngha Lee (DAEIL SYSTEMS); report written date on form 23.12.19.

POSCO FUTURE M GeminiSEM 560 DVIA-MB1000 (230704R3) Installation Report
DVIA-MB1000 installation report (serial 230704R3) for GeminiSEM 560 at POSCO FUTURE M 음극재 site. Summary-of-vibration table lists VC-class cells for Floor versus Active across Z/X/Y curves; embedded plots are floor and active VC curves per axis plus an equipment photograph. Decorative header/logo raster beneath the Word address block is omitted from publication. Reference follows the repo standard Generic Vibration Criteria markdown table (embedded reference raster not republished). The second Y-axis figure follows the Floor plot in Word but was captioned incorrectly twice as Floor; publication labels it Active VC curves to align with Z/X structure.

TUSUR, Tomsk Emcraft Veritas 3100 DVIA-MB1000 Installation Report — 2023.10.27
DVIA-MB1000 (SN 220825R6-3) under Emcraft Veritas 3100 for TUSUR, Tomsk, Russia — engineer itinerary, onsite tuning window, Z/X/Y transmissibility plots (no standalone equipment photograph in source).

Huawei Solaris GMH DVIA-M1000 Installation Report (230509R6-2)
Huawei-end Solaris GMH site (Shanghai): DVIA-M1000 serial 230509R6-2 setup — internal program performance screenshots for Z, X, and Y axes.
Suzhou Sko Semiconductor Sigma 300 DVIA-M1000 (221108R1) Internal Program Performance — 2023.10.26
DVIA-M1000 serial 221108R1 — Suzhou Sko Semiconductor, target equipment Sigma 300, installation and measurement in Suzhou. Handout matches the abbreviated worksheet layout; M1000 internal program plots are labeled Z axis, X axis, and Y axis in the source. Cover-style graphic under the company line is not republished.

Trina Solar sigma300 DVIA-ML1000 (230602R3) Installation Report
DVIA-ML1000 handout (serial 230602R3) for sigma300 at Trina Solar, Changzhou. Published tables and overview match the form; cover/header rasters are omitted. M1000 internal program performance plots are shown for the Z, X, and Y axes. Reference uses the standard Generic Vibration Criteria markdown table only.