Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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SNU Precision DVIA-UB350 (220727R3) Installation Report — Asan
DVIA-UB350 (S/N 220727R3) installation report for SNU Precision headquarters (Asan): first setup noise from stage motion resolved by replacing 70 kg springs with 180 kg springs, followed by second setup and vibration measurement 2022-09-21. Published VC-curve and transmissibility plots (before/after adjustment) for Z/X/Y axes, spring-replacement summary tables, and PULSE 22 measurement setup notes; decorative title-block bitmap (image1) and Generic Vibration Criteria figure (image17) omitted — Reference uses the site VC criterion markdown table.
Tier-1 Semiconductor Hitachi FE SEM DVIA-UB1000 (180305R3) Installation Report — Icheon
DVIA-UB1000 (serial 180305R3, 1140×910×224H mm) installation report at Tier-1 Semiconductor, icheon-si for Hitachi FE SEM equipment — tuned 2022-09-07 by Seounghoon Cheon (DAEIL SYSTEMS), reported 2022-09-14. Measurement with Data Physics Quattro / SignalCalc ACE; FFT 0–80 Hz, Hanning / 800 lines. VC summary (equipment off): Floor vs Active across Z/X/Y bands as in the Measurement Summary table. Publishes equipment-off Floor / Top VC and Transmissibility plots (nine figures). Decorative cover header bitmap omitted; ISO/VC reference chart replaced with markdown table.

New National Metrology Centre GBI DVIA-UB700 (220209R02) Installation Report
DVIA-UB700 (S/N 220209R02) installation report prepared for New National Metrology Centre; GBI system/600 kg at 2 Fusionopolis Way, Singapore; engineer Seounghoon Cheon. Tuning date 22.09.06 and report written date 22.09.14 per worksheet. Publication includes Data and Image: Z/X/Y-axis transmissibility plots; decorative header bitmap (image1) and Reference VC-criteria raster (image5) omitted.

Tier-1 Display Manufacturer Paju M2 SNU CTQ Equipment DVIA-UB350 (220211R02) Retuning Report — 2022-09-08
DVIA-UB350 (1260×800, serial 220211R02) horizontal-isolation performance check and retuning at Tier-1 Display Manufacturer (Paju) M2 for SNU CTQ equipment (2022-09-08 tuning, report 2022-09-14; engineers Cheon Seunghoon and Youngha Lee). Passive level adjusted for stage position and gain increased; six VC curves and transmissibility plots with 5 Hz / 10 Hz attenuation notes. Summary VC-class table; Reference as markdown criteria only.

SNU Precision OCA CTQ Equipment DVIA-UB350 (220614R01) Installation Report
DVIA-UB350 (S/N 220614R01, 1700×725×133H) installation report prepared for SNU Precision, Asan-si; SNU OCA CTQ Equipment; engineer Seounghoon Cheon. Tuning date 22.09.01 and report written date 22.09.02 per worksheet. Summary VC-class table (Floor vs Active) and nine Data and Image plots measured with equipment turned off—floor/top VC curves and transmissibility for Z/X/Y; decorative header bitmap (image1) and Reference VC diagram (image11) omitted in favor of the published markdown criteria table.

CRRC Qishuyan Locomotive & Rolling Stock Technology Research Institute ZEISS SIGMA 300 DVIA-UB1000 (220302R3) Installation Report — Changzhou
DVIA-UB1000 compact installation worksheet (serial 220302R3) for ZEISS SIGMA 300 at CRRC Qishuyan Locomotive & Rolling Stock Technology Research Institute Co., Ltd., CHANGZHOU. Setup 22.08.05, reporting 22.08.11, business-trip line 17.12.27~17.12.29; Overview measurement dated 2022.08.05 (Monday). Publication includes setup photograph and U1000 internal-program Z / X / Y axis screenshots. Decorative header bitmap (image1) omitted.