Installation Report

DVIA-ULF Series

11-03-2022

LG Digital Park (Pyeongtaek) DVIA-UD700 (220513R1) Installation Report

DVIA-ULF Series

Installation Report

LG Digital Park

Pyeongtaek

DVIA-UD700

220513R1

Prepared for

LG DigitalPark(Pyeongtaek)

Prepared by

Engineer: Seounghoon Cheon, Yongha Lee

Tuning date: 22.10.31

Report written date: 22.11.03

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-UD700 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-UD700(1400x1000x390H)

Serial Number: 220513R1

Engineer

Seounghoon Cheon, Yongha Lee from DAEIL SYSTEMS

Tuning Date

October 31, 2022

Location

LG Digtalpark, Pyeongtaek

Equipment

광학관련 개발장비

Measurement Device

7.1) Data Physics

Hardware: Quattro, Serial Number: 22436

Software: SignalCalc ACE

7.2) Measurement Setting

-Bandwidth: 0 – 80 Hz

-Lines: 800

-Window: Hanning

-Averaging: FFT Spectrum Averaging

-Engineering Units: m/s^2

7.3) Sensor

PCB Accelerometer

Model: 393B05

Summary of Vibration Results

Measurement Point	Z-axis (Vertical) / 1-10 Hz	Z-axis (Vertical) / 12.5-80 Hz	X-axis (Left to Right) / 1-10 Hz	X-axis (Left to Right) / 12.5-80 Hz	Y-axis (Front to Back) / 1-10 Hz	Y-axis (Front to Back) / 10-80 Hz
Floor	D	D	G	E	G	G
Active	F	E	G	G	G	G

Data and Image (Equipment Turn off)

Floor Z-axis (Vertical) VC curves

Top Z-axis (Vertical) VC curves

Z-axis (Vertical) Transmissibility

Floor X-axis (Left to Right) VC curves

Top X-axis (Left to Right) VC curves

X-axis (Left to Right) Transmissibility

Floor Y-axis (Front to Back) VC curves

Top Y-axis (Front to Back) VC curves

Y-axis (Front to Back) Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A