Installation Report

DVIA-M Series

07-21-2020

Covis in-house equipment DVIA-M1000 (M1000 P185) measurement — 2020-07-21

DVIA-M Series

Installation Report

Covis

CBIT

DVIA-M1000

M1000 P185

B&K

Internal program

Customer and setup title

코비스-자체 개발장비

(M1000_ P185)

Equipment installation view

Target equipment and site

Target equipment	코비스 자체개발장비
Place of installation	코비스 - 7층
Remark	Good Performance
END USER	코비스(씨비텍)

Operator and dates

Operator: Choi, Hyoung Mun

Date of setup : 20.07.21

Date of reporting : 20.07.22

Date of business trip : 17.12.27~17.12.29

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date: 2020.07.21 (TUE),

Operator: Daeil System, Manager Choi, Hyoung Mun

Place of measurement : 코비스

Equipment Model: 코비스 자체 개발장비

Measurement conditions and results

DAQ System : B&K PULSE 14 & LAN-XI Type 3056

Accelerometer : PCB PIEZOTRONICS 393B05

Frequency Range : 0.7 ~ 200Hz

B&K LAN-XI Type 3056

PCB Piezotronics 393B05

B&K PULSE LabShop workspace

Summary of measurement results

Test Condition

VC-Class

	Z	X	Y
Floor	A	D	D
Above Active	E	E	D

Good omnidirectional performance.

MB1000 internal program performance measurement result

MB1000 internal program — Z axis

MB1000 internal program — X axis

MB1000 internal program — Y axis

Octave Band Result (BASE: Floor, TOP: Above Active)

Octave band — Z axis

Octave band — X axis

Octave band — Y axis

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm line widths.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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