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Installation Report
DVIA-M Series
05-14-2025

ZEISS EVO 10 DVIA-M1000 (191211R3) installation worksheet — 2025.05.14

DVIA-M Series
Installation Report
ZEISS
EVO 10
SEM
DVIA-M1000
191211R3
Internal program

(M1000S_ 191211R3 Set-up)

M1000S setup view

Target equipmentEVO 10(ZEISS)
Place of installation-
RemarkGood Performance
END USER-
Operator: Chaewon LeeDate of business trip : 17.12.27~17.12.29
Date of setup: 25.05.14
Date of reporting: 25.05.16

Overview

The DVIA-M1000S active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 191211R3

Measurement date

2025.05.14(Wednesday)

Operator

Operator: Chaewon Lee from DAEIL SYSTEMS

Place of measurement

-

End User

-

Equipment Model

Manufacturer: ZEISS

Equipment: SEM

Model: EVO10

M1000 internal program performance measurement result

Vertical

Left to Right

Front to Back

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date05-14-2025
Tags
DVIA-M Series
Installation Report
ZEISS
EVO 10
SEM
DVIA-M1000
191211R3
Internal program