Korea University R&D Center RAITH PIONEER Two DVIA-MB1000 Installation Report
1. Overview
DVIA-MB1000 active vibration isolation platform was installed and vibration measurement was performed at the Korea University R&D Center.
Before landing the equipment, a vibration measurement was performed on the DVIA-MB1000 top plate to confirm if the vibration meets the equipment specification.
DVIA-MB1000 was tuned with feedback and feedforward via UI software and vibration measurement was performed using Data Physics equipment for performance verification.
Reference data for the vibration level is provided indicating VC-Curves.
2. Vibration Isolation System Information
Model: DVIA-MB1000
Serial Number: 240508R3
3. Engineer
Chaewon Lee from DAEIL SYSTEMS
4. Tuning Date
July 05, 2024
5. Installation Site
Korea University R&D Center, Room 338
6. Equipment
Manufacturer: RAITH
Equipment: Electron Beam Lithography
Model: PIONEER Two
7. Vibration Specification
8. Equipment Status
Equipment is uninstalled
9. Number of Tuning Trials
1st tuning
10. Measurement Device
1) Data Physics
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
2) Accelerometer
PCB Accelerometer
Model: 393B05
11. Measurement Setup
F Span: 200
Lines: 3200
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
12. Conclusion
Vibration specifications are met in all directions of the equipment.
Vertical, Left to Right, and Front to Back directions all attenuate floor vibrations to VC-G in all frequency bands.
13. Measurement Data
| Measurement Location | Equipment Status | Direction | Vibration Specification | Measured Value | Result |
|---|---|---|---|---|---|
| Floor (R&D Center Room 338) | Uninstalled | Vertical | 8.0E-07 m/s @ 1.6 - 16 Hz | 2.07E-06 m/s @ 10 Hz | ✗ FAIL |
| DVIA-MB1000 | 1.15E-07 m/s @ 10 Hz | ✓ PASS | |||
| Floor | 1.60E-06 m/s @ 16 - 100 Hz | 5.20E-06 m/s @ 31.5 Hz | ✗ FAIL | ||
| DVIA-MB1000 | 2.08E-07 m/s @ 31.5 Hz | ✓ PASS | |||
| Floor | Left to Right | 8.0E-07 m/s @ 1.6 - 16 Hz | 1.70E-06 m/s @ 6.3 Hz | ✗ FAIL | |
| DVIA-MB1000 | 1.67E-06 m/s @ 6.3 Hz | ✓ PASS | |||
| Floor | 1.60E-06 m/s @ 16 - 100 Hz | 1.87E-06 m/s @ 63 Hz | ✗ FAIL | ||
| DVIA-MB1000 | 7.25E-08 m/s @ 63 Hz | ✓ PASS | |||
| Floor | Front to Back | 8.0E-07 m/s @ 1.6 - 16 Hz | 2.47E-06 m/s @ 2.5 Hz | ✗ FAIL | |
| DVIA-MB1000 | 1.64E-07 m/s @ 2.5 Hz | ✓ PASS | |||
| Floor | 1.60E-06 m/s @ 16 - 100 Hz | 1.90E-06 m/s @ 63 Hz | ✗ FAIL | ||
| DVIA-MB1000 | 6.3E-08 m/s @ 63 Hz | ✓ PASS |
14. Data and Images
Vertical VC Curves
Vertical Narrow Band
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
15. Reference
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