Installation Report
DVIA-M Series
02-19-2020
TESCAN LYRA3 FIB-SEM DVIA-MB1000 Installation Report
DVIA-M Series
Installation Report
TESCAN
1. Measurement Details
Measurement Date
February 19, 2020
Measurement Devices
1. LAN-XI Data Acquisition Hardware
– Brüel & Kjæ r 3050-B-040
2. Data Analysis Software
– Brüel & Kjæ r PULSE LAB SHOP 14
3. Sensors
– PCB Accelerometer
– Model: 393B05
Measurement Location
2
nd
Floor
2. Equipment Information
Manufacturer
TESCAN
Model
LYRA3 FIB-SEM
Floor Vibration Specification
< 10 μm/s below 30 Hz
< 20 μm/s above 30 Hz
3. Vibration Isolation System Information
Model: DVIA-MB1000
| Platform Dimensions | 1140 x 910 x 224 mm | |
|---|---|---|
| Load Capacity | 500 - 1700 kg | |
| Actuator | Electromagnetic Actuator | |
| Maximum Actuator Force | Vertical: 40N, Horizontal: 20 N | |
| Degrees of Freedom | 6 degrees | |
| Active Isolation Range | 0.5 - 100 Hz | |
| Vibration Isolation at 2 Hz | ≥90% | |
| Vibration Isolation at 10 Hz | ≥99% | |
| Input Voltage (V) | AC100 - 240V / 50 - 60 Hz / 1A | |
| Power Consumption (W) | Maximum 110W, <50 W in normal operation | |
| Operating Range | Temperature (°C) | 5 - 50 °C |
| Humidity (%) | 20 - 90% | |
| Required Air Pressure | ≥ 0.5 MPa | |
4. Installation Photos
5. Summary
Vibration Criterion Curves
---
| Frequency Range | 1-10 Hz | ||
|---|---|---|---|
| Measurement Direction | Z axis (Vertical) | X axis (Left to Right) | Y axis (Front to Back) |
| Floor | ✗ Fail | ✗ Fail | ✗ Fail |
| On Active Vibration Isolation System | ✓ Pass | ✓ Pass | ✓ Pass |
6. Results
Z-axis (Vertical)
X-axis (Left to Right)
Y-axis (Front to Back)
[IMAGE:]
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date02-19-2020
Tags
DVIA-M Series
Installation Report
TESCAN
