Skip to main content
Installation Report
10-12-2026

Hyundai Motor Company Keyence VHX-X1 Digital Microscope DVIA-TD45 (260722R4) Installation Report

DVIA-T Series
Installation Report
Hyundai Motor Company
Keyence
VHX-X1
Digital Microscope
DVIA-TD45
260722R4

Overview

A case was reported in which, while using the digital microscope (Keysight VHX-X1) on top of the DVIA-TD45 isolation platform installed in the R&D laboratory (C3-4) of Hyundai Motor Company's Namyang Research Institute, the platform began to oscillate when the magnification lens was changed and the equipment moved. As a result of checking with the customer, the floor vibration at the site was at a level that caused no major problem in equipment use even in the Active Off state.

Accordingly, rather than pushing the isolation performance to its maximum, the re-tuning was carried out with an emphasis on stability so that the platform operates stably even when the equipment on top moves or the load changes. After tuning, the system was inspected and vibration measurements were performed in the IDLE state, and the measurement data are provided as VC Curves together with reference material on the vibration level.

Vibration Isolation System Information

Model: DVIA-TD45

Serial Number: 260722R4

Engineer

Gyumin Park, Changhyeon Moon · DAEIL SYSTEMS

Tuning Date

2026.10.12

Site

Hyundai Motor Company Namyang Research Institute C3-4 R&D Lab

End User

Customer: Hyundai Motor Company

Customer Equipment

Manufacturer: Keysight

Equipment: DIGITAL MICROSCOPE

Model: VHX-X1

Vibration Specification

-

Equipment Condition

IDLE

Vibration Measurement Equipment

Measurement Equipment

Hardware: B&K Front End Type 3040-A-040

Software: B&K Pulse Labshop22 Version

Accelerometer

PCB 393B05

Vibration Measurement Setup

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Conclusion

① Oscillation improvement confirmed

After the re-tuning, no oscillation was reproduced even when the equipment on top was moved during lens replacement or magnification changes.

② Vibration measurement results (IDLE state, based on VC Curves)

Vertical (Z): floor VC-A → isolation platform top VC-E (improved by 4 grades)

Front-to-back (Y): floor VC-B → isolation platform top VC-E (improved by 3 grades)

Left-to-right (X): floor VC-A → isolation platform top VC-C (improved by 2 grades)

Measurement Data Summary

Measurement PositionVibration SpecificationMeasurement AxisMeasurement Result
FloorDVIA-TD45
1. Floor
2. DVIA-TD45
Refer to Section 8Vertical (Z-axis)✓ PASS✓ PASS
Left-to-right (X-axis)✓ PASS✓ PASS
Front-to-back (Y-axis)✓ PASS✓ PASS

Measurement Data

Vertical (Z-axis)

Z-axis — Autospectrum

Z-axis — VC Curves

Left to Right (X-axis)

X-axis — Autospectrum

X-axis — VC Curves

Front to Back (Y-axis)

Y-axis — Autospectrum

Y-axis — VC Curves

Installation Photos

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion CurveDescriptionAmplitude¹
μm/s (μin/s)
Detail Size²
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.100 (4,000)25
VC-AAdequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment (including steppers) to 3μm line widths.25 (1,000)3
VC-CAppropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.12.5 (500)1-3
VC-DSuitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.6.25 (250)0.1-0.3
VC-EA challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.3.12 (125)<0.1
VC-FAppropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.1.56 (62.5)N/A
VC-GAppropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.0.78 (31.3)N/A

¹ As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

² The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.

The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.

Share this Case Study

Case Study Information

Category
Installation Report
Date10-12-2026
Tags
DVIA-T Series
Installation Report
Hyundai Motor Company
Keyence
VHX-X1
Digital Microscope
DVIA-TD45
260722R4