Installation Report

DVIA-M Series

03-04-2026

Thermo Fisher Scientific Helios 5 FIB-SEM DVIA-ML1000 Installation Report

DVIA-M Series

Installation Report

Thermo Fisher Scientific

Thermo Fisher

Helios 5

FIB-SEM

DVIA-ML1000

Overview

The DVIA-ML1000 is appropriately installed and functioning as intended for a Thermo Fisher Scientific Helios 5 FIB-SEM (Serial 250904R2), 1st tuning. Equipment is on/IDLE.

Vibration Isolation System Info

Model: DVIA-ML1000

Serial number: 250904R2

Engineer

Chaewon Lee — DAEIL SYSTEMS

Tuning date

March 4, 2026

Report written date

March 23, 2026

End user

N/A

Number of tuning trial

1st

Location

N/A

Equipment

Manufacturer: Thermo Fisher Scientific

FIB-SEM, Model: Helios 5

Vibration specification

No HWL — V: VC-F, H: VC-G

With HWL — V: VC-E, H: VC-F

Equipment status

The equipment is turned on/IDLE

Tuning request

N/A

Measurement summary

Point	State	Axis	Vibration spec	Measured (floor)	Measured (DVIA)	Result
1. Floor / 2. DVIA-ML1000	On/IDLE	Vertical	per spec	VC-C @ 40 Hz	VC-G @ 40 Hz	✗ FAIL / ✓ PASS
		L–R		VC-E @ 3.15 Hz	VC-G @ 3.15 Hz	✗ FAIL / ✓ PASS
		F–B		VC-E @ 12.5 Hz	VC-G @ 12.5 Hz	✗ FAIL / ✓ PASS

Conclusion (implicit)

Floor exceeds the applicable VC curve in the measured bands, while on-table levels meet the specification on the DVIA-ML1000 in all three axes.

Data and Image

Vertical, Left to Right, Front to Back — for each: VC Curves, Autospectrum, Transmissibility (9 plots)

Vertical VC Curves

Vertical Narrow Band

Vertical Transmissibility

Left to Right VC Curves

Left to Right Narrow Band

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Narrow Band

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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