Skip to main content
Installation Report
DVIA-M Series
06-12-2025

South China University of Technology Thermo Fisher Helios 5 DVIA-M1000 (250331R4) Installation Report

DVIA-M Series
Installation Report
Thermo Fisher
FIB-SEM
Helios 5
DVIA-M1000
South China University of Technology
Guangzhou

Contents

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 250331R4

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

June 12, 2025

Report written date

June 12, 2025

Number of Tuning Trial

1st

Location

Guangzhou

End User

South China University of Technology

Equipment

Manufacturer: Thermo Fisher

Equipment: FIB-SEM

Model: Helios 5

Equipment Condition

The equipment is installed / Turned on

Tuning Request

Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date06-12-2025
Tags
DVIA-M Series
Installation Report
Thermo Fisher
FIB-SEM
Helios 5
DVIA-M1000
South China University of Technology
Guangzhou

Related Case Studies

Thermo Fisher Scientific Helios 5 FIB-SEM DVIA-ML1000 Installation Report
DVIA-M Series

Thermo Fisher Scientific Helios 5 FIB-SEM DVIA-ML1000 Installation Report

03-04-2026Read more
YIMO Zhejiang University Ningbo Institute of Technology Thermo Fisher FIB-SEM Scios 2 DVIA-M1000 (240509R7-2) Installation Report
DVIA-M Series

YIMO Zhejiang University Ningbo Institute of Technology Thermo Fisher FIB-SEM Scios 2 DVIA-M1000 (240509R7-2) Installation Report

11-06-2024Read more
YIMO Zhejiang University Ningbo Thermo Fisher FIB-SEM Scios 2 DVIA-M1000 (240820R2) Installation Report
DVIA-M Series

YIMO Zhejiang University Ningbo Thermo Fisher FIB-SEM Scios 2 DVIA-M1000 (240820R2) Installation Report

11-06-2024Read more