Skip to main content
Installation Report
DVIA-P Series
05-12-2025

KIMM Self-made DVIA-P550 Installation Report

DVIA-P Series
Installation Report
KIMM
Self-made

Contents

Overview

Tuning and vibration measurement were performed on the DVIA-P550 installed at the KIMM Building L2A laboratory.

Tuning and vibration measurement were performed with the equipment not installed.

Data are presented as VC Curves, along with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P550

Serial Number: 250210R2-2

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

May 12, 2025

Installation Site

N/A

End User

KIMM (Korea Institute of Machinery & Materials)

Equipment Information

Manufacturer: Self-made

Equipment: -

Model: Self-made

Vibration specification: -

Equipment Status

Equipment is not installed.

Measuring Equipment

Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Vertical: Vibration is attenuated from VC-D to VC-G at 63 Hz.

Left to Right: Vibration is attenuated from VC-D to VC-G at 20 Hz.

Front to Back: Vibration is attenuated from VC-D to VC-G at 25 Hz.

Measurement Data

Measuring PointStatusDirectionMeasurement DataMeasurement Data
FloorDVIA-P550
KIMM Building L2A laboratory
1. Floor
2. DVIA-P550		Equipment is not installedVerticalVC-D
@ 63 Hz		VC-G
@ 63 Hz
Left to RightVC-D
@ 20 Hz		VC-G
@ 20 Hz
Front to BackVC-D
@ 25 Hz		VC-G
@ 25 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date05-12-2025
Tags
DVIA-P Series
Installation Report
KIMM
Self-made

Related Case Studies

KIMM Self-made DVIA-P550 Installation Report
DVIA-P Series

KIMM Self-made DVIA-P550 Installation Report

02-24-2026Read more
Jiotech KIMM L2A laboratory Self-made DVIA-P550 Installation Report
DVIA-P Series

Jiotech KIMM L2A laboratory Self-made DVIA-P550 Installation Report

05-12-2025Read more
Tier-1 Semiconductor DSR Integrated Advanced Technology Lab Self-made DVIA-C-P2200 Installation Report
DVIA-P Series

Tier-1 Semiconductor DSR Integrated Advanced Technology Lab Self-made DVIA-C-P2200 Installation Report

05-21-2026Read more