Installation Report

DVIA-P Series

05-12-2025

Jiotech KIMM L2A laboratory Self-made DVIA-P550 Installation Report

DVIA-P Series

Installation Report

Jiotech

KIMM

Self-made

Customer

Jiotech (제이오텍)

Overview

Tuning and vibration measurement were performed on the DVIA-P550 installed at the KIMM L2A laboratory.

Tuning and vibration measurement were conducted with equipment not installed.

Data are presented as VC curves, along with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P550

Serial Number: 250210R2-1

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

May 12, 2025

Installation Site

KIMM L2A building laboratory

End User

KIMM (Korea Institute of Machinery & Materials)

Equipment Information

Manufacturer: Self-made

Equipment: -

Model: Self-made

Vibration Specification: -

Equipment Status

Equipment not installed

Measuring Equipment

Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Vertical: Attenuates from VC-D to VC-G at 50 Hz.

Left to Right: Attenuates from VC-D to VC-G at 20 Hz.

Front to Back: Attenuates from VC-C to VC-F at 12.5 Hz.

Measurement Data

Measuring Point	Status	Direction	Measurement data (Floor)	Measurement data (DVIA-P550)
KIMM L2A building laboratory 1. Floor 2. DVIA-P550	Equipment not installed	Vertical	VC-D @ 50 Hz	VC-G @ 50 Hz
		Left to Right	VC-D @ 20 Hz	VC-G @ 20 Hz
		Front to Back	VC-C @ 12.5 Hz	VC-F @ 12.5 Hz

Data and Image

Vertical VC Curves

Vertical Auto Spectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Auto Spectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Auto Spectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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