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Installation Report
DVIA-P Series
02-24-2026

KIMM Self-made DVIA-P550 Installation Report

DVIA-P Series
Installation Report
KIMM
Self-made
DVIA-P550

Overview

Tuning and vibration measurement were performed on the DVIA-P550 installed at KIMM L2 building 1F lab.

Tuning and vibration measurement were conducted due to equipment setup changes.

Tuning and vibration measurement were conducted with the equipment Turned on/IDLE.

Data are presented as VC Curves, along with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P550

Serial Number: 250210R2-1

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

February 24, 2026

Installation Site

KIMM L2 building 1F lab

End User

KIMM (Korea Institute of Machinery & Materials)

Equipment Information

Manufacturer: Self-made

Equipment: Self-made

Model: Self-made

Equipment Specifications

N/A

Equipment Status

Equipment Turned on/IDLE

Measuring Equipment

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Vertical: Vibration is attenuated from VC-C to VC-F at 31.5 Hz.

Left to Right: Vibration is attenuated from VC-D to VC-G at 20 Hz.

Front to Back: Vibration is attenuated from VC-C to VC-F at 31.5 Hz.

Measurement Data

Measuring PointStatusDirectionFloor VibrationDVIA-P550
KIMM L2 building 1F lab
1. Floor Vibration
2. DVIA-P550
Turned on/IDLEVerticalVC-C @ 31.5 HzVC-F @ 31.5 Hz
Left to RightVC-D @ 20 HzVC-G @ 20 Hz
Front to BackVC-C @ 31.5 HzVC-F @ 31.5 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date02-24-2026
Tags
DVIA-P Series
Installation Report
KIMM
Self-made
DVIA-P550