Korea Institute of Machine Science EL High Vacuum Chamber DVIA-P1000 Installation Report

Tuning and vibration measurement were performed on the DVIA-P1000 installed in the 1st floor laboratory of Building L2 at Korea Institute of Machine Science.

The inspection and vibration measurement were conducted in the Turn off state.

The data are presented as VC Curves, and reference vibration-level criteria are provided.

Model: DVIA-P1000

Serial Number: 250122R1-2

Seongyun Jeong, DAEIL SYSTEMS

Gyumin Park, DAEIL SYSTEMS

September 22, 2026

Korea Institute of Machine Science, Building L2, 1st Floor Laboratory

Korea Institute of Machine Science

Manufacturer: EL

Equipment: High Vacuum Chamber

Model: N/A

N/A

Idle

Hardware: B&K Front End Type 3040-A-040

Software: B&K Pulse Labshop22 Version

Accelerometer: PCB 393B05

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Tuning and vibration measurement were performed on the DVIA-P1000 (S/N: 250122R1-2) installed for the High Vacuum Chamber (Manufacturer: EL) in the 1st floor laboratory of Building L2 at Korea Institute of Machine Science.

Piping improvement and control stabilization: To solve the problem that previously, when multiple air pipes were bundled and placed together, a pressure difference at a specific point impeded smooth exhaust (OUT), thereby interfering with normal position (POS) control, the air pipes were reconnected as independent lines each, establishing a stable air pressure supply and a precision control environment.

Vibration measurement results: In the Turn-off state, the floor vibration and the vibration level after the vibration isolation platform (DVIA-P1000) was activated were measured by axis and comparatively analyzed as VC Curves. As a result, excellent vibration isolation performance was confirmed on all axes (vertical/left-right/front-back).

Vertical (Z-axis)

Z-axis — Autospectrum

X-axis — Autospectrum

Y-axis — Autospectrum