Installation Report

DVIA-P Series

07-09-2025

Tier-1 Electronics Component Manufacturer DVIA-P2200(250115R1-1) Installation Report

DVIA-P Series

Installation Report

Tier-1 Electronics Manufacturing

Electronics Component Supplier

P2200

Overview

Tuning and vibration measurement were performed on the DVIA-P2200 installed at the Tier-1 Electronics Component Manufacturer Suwon operations site.

Vibration measurement and tuning were conducted with the equipment Turned on/IDLE.

Data are presented as VC curves, and reference information on vibration levels is provided.

Vibration Isolation System Information

Model: DVIA-P2200

Serial Number: 250115R1-1

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

July 9, 2025

Installation Site

Tier-1 Electronics Component Manufacturer Suwon operations site, B5 1F environmental chamber

End User

Tier-1 Electronics Component Manufacturer

Equipment Status

장비설치/IDLE

Equipment Information

Manufacturer: Tier-1 Electronics Component Manufacturer

Equipment: Plating thickness gauge

Model: FCB PSP

Vibration Specifications

VC-B

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

- PCB Accelerometer

- Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

The vibration specification is satisfied in all directions.

Measurement Data

Measuring Point	Status	Direction	Spec	Measurement Data		Result
Measuring Point	Status	Direction	Spec	Floor	DVIA-P2200	Floor	DVIA-P2200
Tier-1 Electronics Component Manufacturer Suwon operations site, B5 1F environmental chamber 1. Floor Vibration 2. DVIA-P2200	Equipment Turned on/IDLE	Vertical	VC-B	VC-C @ 50 Hz	VC-G @ 50 Hz	✓ PASS	✓ PASS
		Left to Right	VC-B	VC-C @ 50 Hz	VC-G @ 50 Hz	✓ PASS	✓ PASS
		Front to Back	VC-B	VC-B @ 50 Hz	VC-G @ 50 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A