Techsend Photomask CLB KLA Reticle Inspection System KLA597XR DVIA-P4000 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-P4000 installed at Techsend Photomask CLB.
Feedback and feedforward tuning were performed through UI software by connecting the DVIA-P4000 to a laptop, and performance inspection was conducted through vibration measurement using Brüel & Kjær DAQ measurement equipment.
Measurement data are provided compared to the vibration requirement.
Isolation Platform
Model: DVIA-P4000
Serial Number: 241202R4
Engineer
Field engineer Chaewon Lee from DAEIL SYSTEMS
Measurement Date
December 29, 2024
Installation Site
Techsend Photomask CLB
End User
Techsend Photomask
Customer Equipment
Manufacturer: KLA
Equipment: Reticle Inspection System
Model: KLA597XR
Equipment Status
장비 미설치
Vibration specification
Measuring Equipment
10.1) Brüel & Kjær LAN-XI DAQ Type 3050 DAQ
Hardware: B&K Front End Type 3050-A-040
Software: B&K Pulse Labshop 22 Version
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 1600 Hz
Lines: 1600
Engineering Units: m/s/Hz1/2
Window: Hanning
Averaging: FFT Spectrum Averaging
Average: Stable, 20
Conclusion
Meets vibration specifications in all directions.
Measurement Data
| Measuring Point | Status | Equipment spec | Direction | Measurement data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-P4000 | Floor | DVIA-P4000 | ||||
| (unit: um/s/Hz1/2) | (unit: um/s/Hz1/2) | ||||||
| CLB Room 1. Floor 2. DVIA-P4000 | 장비 미설치 | 20 um/s/Hz1/2 | Vertical | 173 @ 1 Hz | 12.85 @ 1 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | 103 @ 1 Hz | 3.562 @ 1 Hz | ✗ FAIL | ✓ PASS | |||
| Front to Back | 18.1 @ 1 Hz | 6.372 @ 1 Hz | ✓ PASS | ✓ PASS | |||
Data and Image
Vertical Velocity Spectral Density
Left to Right Velocity Spectral Density
Front to Back Velocity Spectral Density
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