Installation Report

DVIA-M Series

01-23-2026

YIMO Shanghai Pumi PrMat STM DVIA-M1000 (241101R2) Installation Report — Huasheng Lianying Vibration Damping Platform

DVIA-M Series

Installation Report

YIMO

DVIA-M1000

241101R2

Shanghai

STM

PrMat

Shanghai Pumi

Overview

The DVIA-ML1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 241101R2

Prepared for

Shanghai Pumi Precision Instrument Technology Co., Ltd.

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

January 22, 2026

Report written date

26.01.23

End User

Huasheng Lianying Vibration Damping Platform

Number of Tuning Trial

1st

Location

Shanghai, China

Equipment

Manufacturer: Shanghai Pumi Precision Instrument Technology Co., Ltd.

Equipment: STM

Model: PrMat STM

Vibration specification

N/A

Equipment Condtion

The equipment is turned on/IDLE

Tuning Request

N/A

Measurement Summary

Status	Axis	Floor	DVIA-M1000
PrMat STM is turned on/IDLE	Vertical	VC-C @ 31.5 Hz	VC-G @ 31.5 Hz
	Left to Right	VC-E @ 3.15 Hz	VC-G @ 3.15 Hz
	Front to Back	VC-D @ 2.5 Hz	VC-G @ 2.5 Hz

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A