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Installation Report
DVIA-M Series
01-23-2026

Shanghai Pumi PrMat STM DVIA-M1000 (241101R2) Installation Report — Huasheng Lianying Vibration Damping Platform

DVIA-M Series
Installation Report
DVIA-M1000
241101R2
Shanghai
STM
PrMat
Shanghai Pumi

Contents

Overview

The DVIA-ML1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 241101R2

Prepared for

Shanghai Pumi Precision Instrument Technology Co., Ltd.

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

January 22, 2026

Report written date

26.01.23

End User

Huasheng Lianying Vibration Damping Platform

Number of Tuning Trial

1st

Location

Shanghai, China

Equipment

Manufacturer: Shanghai Pumi Precision Instrument Technology Co., Ltd.

Equipment: STM

Model: PrMat STM

Vibration specification

N/A

Equipment Condtion

The equipment is turned on/IDLE

Tuning Request

N/A

Measurement Summary

StatusAxisFloorDVIA-M1000
PrMat STM is turned on/IDLEVerticalVC-C @ 31.5 HzVC-G @ 31.5 Hz
Left to RightVC-E @ 3.15 HzVC-G @ 3.15 Hz
Front to BackVC-D @ 2.5 HzVC-G @ 2.5 Hz

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Criterion CurveDescriptionAmplitude
µm/s (µin/s)		Detail Size
µm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date01-23-2026
Tags
DVIA-M Series
Installation Report
DVIA-M1000
241101R2
Shanghai
STM
PrMat
Shanghai Pumi

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