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Installation Report
DVIA-M Series
11-14-2024

Hefei Pilot Film ZEISS FE-SEM Sigma360 DVIA-M1000 (240509R7-3) Installation Report

DVIA-M Series
Installation Report
ZEISS
Sigma360
FE-SEM
DVIA-M1000
240509R7-3

Contents

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 240509R7-3

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

November 12, 2024

Report written date

24.11.14

Prepared for

Hefei Pilot Film

Number of Tuning Trial

1st

Location

Hefei, China

Equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma360

Equipment Condition

The equipment is installed/Turned off

Tuning Request

Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment photo

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
µm/s (µin/s)		Detail Size
µm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date11-14-2024
Tags
DVIA-M Series
Installation Report
ZEISS
Sigma360
FE-SEM
DVIA-M1000
240509R7-3

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