Installation Report

DVIA-M Series

05-20-2025

Tomocube Holotomography DVIA-MO1000 (240507R4-1) Installation Report

DVIA-M Series

Installation Report

Tomocube

Holotomography

DVIA-MO1000

240507R4-1

Overview

토모큐브 신사옥으로 이전 설치된 DVIA-MO1000 튜닝 및 진동측정 진행하였습니다.

장비 안착 후 장비 Turned off 상태로 진동측정 및 튜닝 진행하였습니다.

Data를 VC-Curve로 표기 후 진동 수준에 대한 Reference 자료를 제공합니다.

Vibration Isolation System Information

Model: DVIA-MO1000

Serial Number: 240507R4-1

Engineer

대일시스템 필드엔지니어 이채원

Tuning Date

2025년 05월 19일

Report written date

25.05.20

End User

토모큐브

Number of Tuning Trial

3회차(1회차: 24.07.18, 2회차: 24.07.18)

Location

(주)준형 2층 DEMO실

Equipment

Manufacturer: 토모큐브

Equipment: Holotomography

Model: HT-R1 Rev3 Demo-001

Vibration specification

VC-G

Equipment Condition

장비 제진대 위에 안착 및 Turned off

Measurement Summary

Measurement site	State	Direction	Specification	Floor	DVIA-MO1000	Result	Result
위치: DEMO실 1. 바닥 2. DVIA-MO1000	설치완료 /Turned off	Vertical	VC-G	VC-D @ 8 Hz	VC-G @ 8 Hz	✗ FAIL	✓ PASS
		Left to Right		VC-D @ 2 Hz	VC-G @ 2 Hz	✗ FAIL	✓ PASS
		Front to Back		VC-D @ 8 Hz	VC-G @ 8 Hz	✗ FAIL	✓ PASS

Data and Image

Vertical VC Curves

Vertical Narrow Band

Vertical Transmissibility

Left to Right VC Curves

Left to Right Narrow Band

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Narrow Band

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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