Installation Report

DVIA-M Series

05-11-2026

YIMO Zeiss Technology (Suzhou) ZEISS EVO 10 DVIA-MB1000 (240304R8) Installation Report

DVIA-M Series

Installation Report

YIMO

ZEISS

EVO 10

DVIA-MB1000

Overview

The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-MB1000

Serial Number: 240304R8

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

April 4, 2024

Report written date

April 9, 2024

End User

Zeiss Technology (Suzhou) Co., Ltd

Number of Tuning Trial

2nd tuning

Location

Suzhou, China

Equipment

Zeiss EVO 10

Equipment Condition

The equipment is installed / Turn Off

Tuning Request

Equipment allowable vibration

1-30Hz＜6 um/s，大于30Hz＜12 um/s

Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information