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Installation Report
DVIA-M Series
11-24-2023

Beijing Academy of Quantum Information Sciences STM DVIA-M1000 (230905R3) Installation Report

DVIA-M Series
Installation Report
Beijing Academy of Quantum Information Sciences
STM
DVIA-M1000
230905R3

Contents

Target equipment

STM

Place of installation

BEIJING

Remark

Good Performance

End User

Beijing Academy of Quantum Information Sciences

Operator

Yu, Hosang

Date of setup

23.11.23

Date of reporting

23.11.24

Date of business trip

17.12.27~17.12.29

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date

2023.11.23 (Thursday)

Operator: DAEIL SYSTEMS Hosang Yu

Place of measurement

BEIJING

Equipment Model

STM

M1000 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date11-24-2023
Tags
DVIA-M Series
Installation Report
Beijing Academy of Quantum Information Sciences
STM
DVIA-M1000
230905R3

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