Installation Report
DVIA-M Series
07-05-2024
Tier-1 Semiconductor ZEISS Sigma 300 VP / JEOL IT800 SEM DVIA-M-JSA (230512R3) Internal Program Measurement Report
DVIA-M Series
Installation Report
ZEISS Sigma 300 VP
JEOL
SEM IT800
DVIA-M-JSA
230512R3
Ningbo
Contents
Ningbo SMIC
(M-JSA_ 230512R3 Set-up)
| Target equipment | ZEISS Sigma 300 VP |
|---|---|
| Place of installation | Ningbo |
| Remark | Good Performance |
| END USER | Ningbo SMIC |
Operator: Chaewon Lee
Date of setup: 24.05.28
Date of reporting: 24.07.05
Date of business trip : 17.12.27~17.12.29
Overview
The DVIA-M-JSA active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2024.05.28(Tuesday)
Operator: Chaewon Lee from DAEIL SYSTEMS
Place of measurement: Ningbo
Equipment Model:
Manufacturer: JEOL
Equipment: SEM
Model: IT800
M-JSA internal program performance measurement result
Vertical
Left to Right
Front to Back
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date07-05-2024
Tags
DVIA-M Series
Installation Report
ZEISS Sigma 300 VP
JEOL
SEM IT800
DVIA-M-JSA
230512R3
Ningbo
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