Installation Report
DVIA-P Series
03-27-2023
Hua Hong Semiconductor (Wuxi) ASML eScan500 DVIA-P4000 (221227R2) Installation Report
DVIA-P Series
Installation Report
Hua Hong Semiconductor
Wuxi
ASML
eScan500
DVIA-P4000
221227R2
Contents
End User
HUA HONG SEMICONDUCTOR(WUXI) LIMITED
Target Equipment
ASML eScan500
Place of Installation
WUXI
Remark
Good Performance
Setup Operator
Yu, Ho sang / Lee, Young ha
Date of setup
23.03.22~23
Date of reporting
23.03.27
Date of business trip
Date of business trip : 17.12.27~17.12.29
Overview
The DVIA-P4000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2023.03.22~23 (Wednesday, Thursday)
Operator: DAEIL SYSTEMS, Hosang Yu, Youngha Lee
Place of measurement: WUXI
Equipment Model: ASML eScan500
Vibration Isolation System Information
Model: DVIA-P4000
Serial Number: 221227R2
Summary of measurement results
| Measurement Point | Z-axis (Vertical)1-10 Hz | Z-axis (Vertical)12.5-80 Hz | X-axis (Left to Right)1-10 Hz | X-axis (Left to Right)12.5-80 Hz | Y-axis (Front to Back)1-10 Hz | Y-axis (Front to Back)12.5-80 Hz |
|---|---|---|---|---|---|---|
| Turn off | D | C | D | D | D | D |
| Turn on | F | D | E | D | F | D |
Octave Band Result
Z axis Velocity rms Graph
Z axis Acceleration rms Graph
X axis Velocity rms Graph
X axis Acceleration rms Graph
Y axis Velocity rms Graph
Y axis Acceleration rms Graph
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Case Study Information
Category
Installation Report
SeriesDVIA-P Series
Date03-27-2023
Tags
DVIA-P Series
Installation Report
Hua Hong Semiconductor
Wuxi
ASML
eScan500
DVIA-P4000
221227R2
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