YIMO China business trip report — DVIA-T65 service and DVIA-P4000 setup at Tier-1 Semiconductor (March 2023)

YIMO Tech — China business trip report

Objectives: DVIA-T65(220210R1-1) inspection, repair, and vibration measurement; DVIA-P4000 setup and vibration measurement.

2023.03.20 (Mon) — Tool and parts check; China visa pickup (Giheung Hanatour); travel Incheon–Manila (transit).

2023.03.21 (Tue) — Transit to Shanghai Pudong; YIMO Tech TIM CHEN pickup and hotel; YIMO Tech Office; DVIA-T65(220210R1-1) repair and performance measurement (see §1).

2023.03.22 (Wed) — Tier-1 Semiconductor (Wuxi) site; P4000 passive unit air piping; controller and cable connection; floating / feedback / feedforward tuning; vibration measurement; cable-routing mitigation; tuning and measurement with equipment powered on; factory test comparison; IDE Active isolator confirmation; coordination calls; trip extension (see §2).

2023.03.23 (Thu) — Filter application tests; vibration data collection under multiple passive/active and measurement-point conditions (see §2).

Symptoms: during auto leveling one of four springs did not rise after descending; all four springs rose during locking — limit switch damage suspected.

Repair: cover removed, limit switch inspected, damaged part replaced.

Tuning and performance measurement followed.

Vibration measurement summary:

Normal operation confirmed; unit reassembled.

Installation site: Tier-1 Semiconductor (Wuxi). Passive P4000 unit air piping connected; controller placed and cables connected; floating, feedback, and feedforward tuning performed.

With ASML equipment powered on, clean phase and transmissibility plots were not obtained; resonance above 0 dB occurred between 10~20 Hz.

Initial vibration measurement (2023.03.22):

Vibration results showed top-plate levels larger than floor in the 10~25 Hz band.

Cable routing fixed above the ASML tool was judged to reduce actuator control force; bolts were removed and supports placed under the routing without interfering with the ASML tool. Resonance near 20 Hz remained after retuning.

With equipment power on, the customer declined power cycling (estimated 5~7 days). Without pre-installation first-stage tuning, 20 Hz resonance could not be attributed solely to equipment vibration or a structural resonance mode; factory test did not show the symptom — product defect was ruled out.

An IDE Active isolator stack above the tool was confirmed.

Prior internal testing of active-on-active stacks noted feedforward/feedback conflicts and oscillation risk; SHOWA and Daeil Systems concluded the arrangement unsuitable (reference: M-type multi-stage isolator performance test document).

YIMO Tech requested maintaining the installed environment (IDE + TMC isolators) for future order evaluation while seeking resonance reduction.

2023.03.23 — Lead/lag and lowpass filters did not reduce the ~20 Hz peak; raising feedback gain increased the peak; tuning focused on lowering feedback gain.

Morning — P4000 passive, P4000 top plate to IDE isolator top plate:

P4000 active, P4000 top plate to IDE isolator top plate:

Afternoon — P4000 passive, floor to P4000 top plate:

P4000 passive, P4000 top plate to IDE isolator top plate (afternoon):

P4000 active, floor to P4000 top plate:

P4000 active, floor to IDE isolator top plate:

Morning vs afternoon IDE active isolator top/bottom data differed; ASML engineer operation during afternoon work suggested IDE isolator active only during tool operation.

Limit switch was damaged and replaced; performance normal.

At the ASML equipment measurement plane (above IDE Active isolator), vibration results met equipment spec: Z-axis VC-G; X- and Y-axis VC-E — sufficiently satisfying the VC-D equipment requirement.

The DVIA-P4000 ~20 Hz peak (structural resonance) was not resolved. With upper equipment powered on, root cause could not be judged definitively; factory test and installed equipment environment / equipment natural frequency are the likely contributors. For future DVIA-P4000 orders with the same ASML tool, first-stage tuning before equipment installation is recommended.

Two-stage active products (P4000 + IDE Active isolator) were installed. YIMO TECH did not identify upper active isolation before installation completed; active presence was recognized during setup. ASML engineers appeared to activate IDE isolator only during tool operation; resonance also occurred with IDE off — upper active isolator was judged not to be the sole cause. No oscillation was observed despite two-stage active use. Further study with SHOWA on two-stage active stability and resonance is planned.

Active: IDE-ATAN module series — ATAN100, ATAN300, ATAN500.

ATAN-100 load: 600 kg ~ 1800 kg; ATAN-300 load: 1000 kg ~ 2500 kg; ATAN-500 load: 2000 kg ~ 6000 kg.

Active product applied on ASML equipment: ATAN-300 estimated.