Installation Report

DVIA-M Series

05-16-2026

TESCAN Korea LB Semicon Amber X GMH DVIA-MB1000 (221202R2) Installation Report

DVIA-M Series

Installation Report

TESCAN Korea

DVIA-MB1000

AMBER X GMH

Overview

The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-MB1000

Serial Number: 221202R2

Engineer

Sangjae Lee, Jongwon Park from DAEIL SYSTEMS

Tuning Date

July 25, 2023

Report written date

July 25, 2023

Date of business trip

17.12.27~17.12.29

Location

LB세미콘 4F 클린룸, 평택

Equipment

AMBER X GMH

Summary of Vibration Results

Measurement Point	Z-axis (Vertical) 1-10 Hz	Z-axis (Vertical) 12.5-80 Hz	X-axis (Left to Right) 1-10 Hz	X-axis (Left to Right) 12.5-80 Hz	Y-axis (Front to Back) 1-10 Hz	Y-axis (Front to Back) 12.5-80 Hz
Floor	B	B	C	E	B	E
Active	D	E	E	E	F	F

Data and Image

Z-axis (Vertical) VC curves

Z-axis (Vertical) Transmissibility

X-axis (Left to Right) VC curves

X-axis (Left to Right) Transmissibility

Y-axis (Front to Back) VC curves

Y-axis (Front to Back) Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

ZOLIX Shanghai Institute of Technology and Technology Three-axis Vibration Exciter DVIA-MB1000 (220330R5-3) Installation Report

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