Installation Report
DVIA-M Series
03-20-2023
Carl Zeiss Suzhou ZEISS EVO DVIA-M1000 (221130R2) Internal Program Performance — 2023.03.20
DVIA-M Series
Installation Report
Carl Zeiss
ZEISS EVO
Suzhou
DVIA-M1000
221130R2
Contents
(M1000_ 221130R2 Set up)
| Target equipment | ZEISS EVO |
|---|---|
| Place of installation | SUZHOU |
| Remark | Good Performance |
| END USER | Carl Zeiss Suzhou Co.,Ltd |
| Operator: Lee, Young Ha | Date of business trip : 17.12.27~17.12.29 |
| Date of setup: 23.03.20 | |
| Date of reporting: 23.04.24 |
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date
2023.03.20 (Monday)
Operator
Operator: DAEIL SYSTEMS, Youngha Lee
Place of measurement
SUZHOU
Equipment Model
ZEISS EVO
MB1000 internal program performance measurement result
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date03-20-2023
Tags
DVIA-M Series
Installation Report
Carl Zeiss
ZEISS EVO
Suzhou
DVIA-M1000
221130R2
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