Installation Report

DVIA-P Series

05-20-2026

Hallym University JEOL JBX-8100FS DVIA-P2200 Installation Report

DVIA-P Series

Installation Report

Hallym University

JEOL

JBX-8100FS

Overview

Inspection and vibration measurement were performed on the DVIA-P2200 installed at Hallym University Industry-Academic Cooperation Building 4F FAB.

Vibration on the equipment was observed when the compressor ran in the FAB, and an inspection was requested.

Vibration measurement and tuning were performed with the equipment Turned on/IDLE.

Data are presented as VC curves, along with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P2200

Serial Number: 220926R2

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

October 2, 2025

Installation Site

Hallym University Industry-Academic Cooperation Building 4F FAB

End User

Hallym University

Equipment Status

장비설치/IDLE

Equipment Information

Manufacturer: JEOL

Equipment: Electron Beam Lithography

Model: JBX-8100FS

Vibration specification

Measuring Equipment

Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

On every site visit, the vibration isolation performance of the isolator was somewhat reduced.

Performance was restored through tuning, and resolution on site was confirmed.

Vibration specifications are satisfied in all directions.

Measurement Data

Measurement site	State	Direction	Measurement Data		Result
Measurement site	State	Direction	Floor Vibration	DVIA-P2200	Floor Vibration	DVIA-P2200
Hallym University Industry-Academic Cooperation Building 4F FAB 1. Floor Vibration 2. DVIA-P2200	장비 Turned on/IDLE	Vertical	VC-B @ 31.5 Hz	VC-E @ 31.5 Hz	✗ FAIL	✓ PASS
		Left to Right	VC-D @ 63 Hz	VC-G @ 63 Hz	✓ PASS	✓ PASS
		Front to Back	VC-D @ 1.6 Hz	VC-F @ 1.6 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Left to Right VC Curves

Front to Back VC Curves

Equipment Photo

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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