Installation Report

DVIA-ULF Series

11-22-2023

ARCHE Semilab AFM-2000 DVIA-UB350 (220621R1) Inspection Report

DVIA-ULF Series

Inspection Report

ARCHE

Semilab

AFM-2000

DVIA-UB350

220621R1

Prepared for

ARCHE

Prepared by

Engineer: Youngha Lee Tuning date: 23.11.21 Report written date: 23.11.22	Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-UB350 active vibration isolation platform is appropriately installed and functioning as intended.

System information

Model: DVIA-UB350

Serial Number: 220621R1

Engineer: Youngha Lee, from DAEIL SYSTEMS

Tuning Date: November 21, 2023

Location: ARCHE, 화성시 안녕길 147

Equipment: AFM-2000

Summary of vibration measurement results

Idle-state vibration measurement

Measurement Point	Z-axis (Vertical) 1–10 Hz	Z-axis (Vertical) 12.5–80 Hz	X-axis (Left to Right) 1–10 Hz	X-axis (Left to Right) 12.5–80 Hz	Y-axis (Front to Back) 1–10 Hz	Y-axis (Front to Back) 10–80 Hz
Floor	D	C	C	C	D	D
Active	G	G	F	G	G	G

During AFM operation

Measurement Point	Z-axis (Vertical) 1–10 Hz	Z-axis (Vertical) 12.5–80 Hz	X-axis (Left to Right) 1–10 Hz	X-axis (Left to Right) 12.5–80 Hz	Y-axis (Front to Back) 1–10 Hz	Y-axis (Front to Back) 10–80 Hz
Floor	E	C	D	F	C	D
Active	G	G	F	E	F	G

Data and Image

Z-axis (Vertical) Transmissibility

Z-axis (Vertical) VC-Curve graph(평상시)

Z-axis (Vertical) VC-Curve graph (AFM 작동 시)

제진대 하부의 진동 레벨은 VC-G로 매우 좋은 상태입니다.

AFM작동 시에도 진동레벨에는 큰 변화가 없습니다.

X-axis (Left to Right) Transmissibility

X-axis (Vertical) VC-Curve graph(평상시)

X-axis (Vertical) VC-Curve graph (AFM 작동 시)

제진대 하부의 진동 레벨은 VC-F로 매우 좋은 상태입니다.

AFM작동 시 60Hz에서 전기 Noise로 의심되는 값이 출력되었습니다.

피크 형태의 진동으로 이러한 형태는 일반적으로 전기 Noise입니다.

Y-axis (Front to Back) Transmissibility

Y-axis (Vertical) VC-Curve graph(평상시)

Y-axis (Vertical) VC-Curve graph (AFM 작동 시)

제진대 하부의 진동 레벨은 VC-G로 매우 좋은 상태입니다.

AFM작동 시에도 진동레벨에는 큰 변화가 없습니다.

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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