Installation Report

DVIA-ULF Series

11-21-2023

ARCHE Semilab AFM-2000 DVIA-UB350 Inspection Report

DVIA-ULF Series

Inspection Report

ARCHE

Semilab

AFM

Overview

The DVIA-UB350 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-UB350

Serial Number: 220621R1

Engineer: Youngha Lee, from DAEIL SYSTEMS

Tuning Date: November 21, 2023

Location: ARCHE, 147, Annyeong-gil, Byeongjeom-gu, Hwaseong-si, Gyeonggi-do, Republic of Korea

Equipment: AFM-2000

Summary of vibration measurement results

Idle state

Measurement Point	Z-axis (Vertical) 1–10 Hz	Z-axis (Vertical) 12.5–80 Hz	X-axis (Left to Right) 1–10 Hz	X-axis (Left to Right) 12.5–80 Hz	Y-axis (Front to Back) 1–10 Hz	Y-axis (Front to Back) 10–80 Hz
Floor	D	C	C	C	D	D
Active (DVIA-UB350)	G	G	F	G	G	G

AFM in operation

Measurement Point	Z-axis (Vertical) 1–10 Hz	Z-axis (Vertical) 12.5–80 Hz	X-axis (Left to Right) 1–10 Hz	X-axis (Left to Right) 12.5–80 Hz	Y-axis (Front to Back) 1–10 Hz	Y-axis (Front to Back) 10–80 Hz
Floor	E	C	D	F	C	D
Active (DVIA-UB350)	G	G	F	E	F	G

Data and Image

Z-axis (Vertical) Transmissibility

Z-axis (Vertical) VC-Curve — Idle

Z-axis (Vertical) VC-Curve — AFM On

The vibration level under the isolator is very good at VC-G. There is no significant change in vibration level during AFM operation.

X-axis (Left to Right) Transmissibility

X-axis (Left to Right) VC-Curve — Idle

X-axis (Left to Right) VC-Curve — AFM On

The vibration level under the isolator is very good at VC-F. A suspicious value at 60 Hz that appears to be electrical noise was observed during AFM operation. This peak-type vibration is generally electrical noise.

Y-axis (Front to Back) Transmissibility

Y-axis (Front to Back) VC-Curve — Idle

Y-axis (Front to Back) VC-Curve — AFM On

The vibration level under the isolator is very good at VC-G. There is no significant change in vibration level during AFM operation.

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

*Notes:*

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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