Installation Report
DVIA-M Series
07-05-2024
ZEISS GeminiSEM 360 DVIA-M1000 Internal Performance Report (220603R4, 2024-07-05)
DVIA-M Series
Installation Report
ZEISS
GeminiSEM 360
DVIA-M1000
220603R4
Contents
Site checklist
| Target equipment | ZEISS GeminiSEM360 |
|---|---|
| Place of installation | N/A |
| Remark | Good Performance |
| END USER | N/A |
Operator and dates
Operator: Chaewon Lee
Date of setup: 23.08.09
Date of reporting: 24.07.05
Date of business trip : 17.12.27~17.12.29
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2023.08.09(Wednesday)
Operator: Chaewon Lee from DAEIL SYSTEMS
Place of measurement: N/A
Equipment Model: N/A
Manufacturer: ZEISS
Equipment: SEM
Model: GeminiSEM360
5.
M1000 internal program performance measurement result
Vertical
Left to Right
Front to Back
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date07-05-2024
Tags
DVIA-M Series
Installation Report
ZEISS
GeminiSEM 360
DVIA-M1000
220603R4
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