SJ SEMI ZEISS CROSSBEAM 350 DVIA-ML1000 Installation Report
Report header
Operator: Yu, Ho Sang
Date of setup: 22.08.31
Date of reporting: 22.09.01
1. Vibration Isolation System Info
Model: DVIA-ML1000 — Serial: 220407R5
2. Engineer
Yu, Ho Sang
3. Tuning date
August 31, 2022
4. Report written date
September 1, 2022
5. End user
SJ SEMI(盛合晶微半导体江阴有限公司)
6. Installation site
JIANGYIN
7. Equipment
Target equipment / model: ZEISS CROSSBEAM350 — Manufacturer: ZEISS
Remark: Good Performance
8. Equipment status
N/A
9. Number of tuning trial
N/A
10. Measurement device
N/A
11. Measurement setup
N/A
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2022.08.31 (Wednesday)
Operator: DAEIL SYSTEMS, Hosang Yu
Place of measurement: JIANGYIN
Equipment Model: ZEISS CROSSBEAM350
12. Measurement summary
| Test Condition | Z | X | Y |
|---|---|---|---|
| Floor | B | B | B |
| Above Active | F | D | E |
Good omnidirectional performance.
13. Data & image
MB1000 internal program performance measurement result — Z axis
MB1000 internal program performance measurement result — X axis
MB1000 internal program performance measurement result — Y axis
Octave Band Result — Z axis
Octave Band Result — X axis
Octave Band Result — Y axis
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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