Seoul National University — M-1000 P3 vibration environment measurement after service (ZEISS equipment, 2015-01-27)
Contents
Vibration environment measurement results (Seoul National University Precision Machine Interdisciplinary Research Building)
Overview
To assess whether the vibration environment satisfies equipment use requirements after corrective action for the M-1000 P3 isolation platform issue.
Measurement date: 2015. 1. 27 (Wednesday). Operator: Choi Seong-won.
3. Measurement conditions and results
Carl Zeiss equipment is operating.
The sensor locations are the front of the isolation platform top plate (top) and the front floor at the platform base (base); measurements were taken without excitation.
Measurement setup
Results summary
| Test Direction | VC-Class | Base | Top |
|---|---|---|---|
| ACTIVE | Z | B | G |
| X | E | G | |
| Y | F | G |
Isolation platform intrinsic performance is satisfactory.
With active control, the vibration environment on the platform top is G class and satisfactory.
OCTAVE BAND
Active Z
Active X
Active Y
4. Work performed
Issue identification: Noise consistent with vibration was observed on SEM images, and the controller VIB lamp was not operating.
Action: After connecting with the communication program and checking status, it was confirmed the controller was down. After resetting the controller, normal operation was confirmed.
The controller down condition is presumed to have been caused by lightning outage or power interruption, etc.; the user was instructed that if the same problem recurs, power should be cycled to restore operation.
Other work items:
Passive float status check — no abnormality
Controller wiring status check — no abnormality
Controller stability and performance check — no abnormality
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