Installation Report

DVIA-M Series

08-25-2021

TESCAN MIRA3 XMH DVIA-M1000 (200824R2) Installation Report — 2021.08.25

DVIA-M Series

Installation Report

TESCAN

MIRA3 XMH

Cryo FIB-SEM

DVIA-M1000

200824R2

Prepared by

Engineer: Chaewon Lee

Tuning date: 21.08.25

Report written date: 25.06.11

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 200824R2

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

August 25, 2021

Number of Tuning Trial

1st

End User

N/A

Equipment Condition

Manufacturer: TESCAN

Equipment: Cryo FIB-SEM

Model: MIRA3 XMH

The equipment is installed/IDLE

Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm line widths.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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