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Installation Report
DVIA-M Series
07-17-2020

ZEISS FE SEM DVIA-MB1000 P178 Internal Program Performance — Tier-1 Semiconductor — 2020.07.17

DVIA-M Series
Installation Report
Tier-1 Semiconductor
ZEISS
FE SEM
Carl Zeiss
DVIA-MB1000
P178
Internal Program
Icheon

Contents

(MB1000_ P178)

Target equipmentZEISS - FE SEM
Place of installationM14 B1 분석실
RemarkGood Performance
END USERTier-1 Semiconductor
Operator: Choi, Hyoung MunDate of business trip : 17.12.27~17.12.29
Date of setup : 20.07.16
Date of reporting : 20.07.17

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date

2020.07.17 (FRI),

Operator

Operator: Daeil System, Manager Choi, Hyoung Mun

Place of measurement

Tier-1 Semiconductor (Icheon)

End User

Tier-1 Semiconductor

Equipment Model

FEI - ZEISS - FE SEM

Measurement conditions and results

DAQ System : B&K PULSE 14 & LAN-XI Type 3056

Accelerometer : PCB PIEZOTRONICS 393B05

Frequency Range : 0.7 ~ 200Hz

B&K LAN-XI Type 3056

PCB Piezotronics Model 393B05

B&K PULSE LabShop workspace

Summary of measurement results

Test ConditionVC-Class ZVC-Class XVC-Class Y
FloorDFF
Above ActiveGGG

Good omnidirectional performance.

MB1000 internal program performance measurement result

Z axis

X axis

Y axis

Octave Band Result (BASE: Floor, TOP: Above Active)

Z axis - Octave band

X axis - Octave band

Y axis - Octave band

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date07-17-2020
Tags
DVIA-M Series
Installation Report
Tier-1 Semiconductor
ZEISS
FE SEM
Carl Zeiss
DVIA-MB1000
P178
Internal Program
Icheon

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