Installation Report
DVIA-M Series
12-09-2019
Hugong Heavy Machinery (沪工重机) ZEISS-EVO18 DVIA-MB1000 (MB1000 P125 / 190531R4) worksheet — 2019.12.09
DVIA-M Series
Installation Report
Hugong Heavy Machinery
ZEISS
EVO18
DVIA-MB1000
MB1000
P125
190531R4
FIBERHOME
Contents
Hugong Heavy Machinery (沪工重机)
沪工重机
(MB1000_190531R4 Set up)
Site checklist
| Target equipment | ZEISS-EVO18 |
|---|---|
| Place of installation | F1, 沪工重机 |
| Remark | Good Performance |
| END USER | 沪工重机 |
Operator and dates
Operator: Choi, Hyoung Mun
Date of setup : 19.12.04
Date of reporting : 19.12.09
Date of business trip : 17.12.27~17.12.29
Overview
After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.
Measurement date: 2019.12.04 (Wed),
Operator: Daeil System, Manager Choi, Hyoung Mun
Place of measurement : F1, FIBERHOME R&D CENTER
Equipment Model: ZEISS-EVO18
Measurement conditions and results
N/A
Summary of measurement results
| Test Condition | VC-Class Z | VC-Class X | VC-Class Y |
|---|---|---|---|
| Floor | D | D | D |
| Above Active | G | D | D |
Good omnidirectional performance.
60Hz vibration caused by SEM equipment
MB1000 internal program performance measurement result
Z axis
X axis
Y axis
Octave Band Result (BASE: Floor, TOP: Above Active)
Octave Band Result — Z axis
Octave Band Result — X axis
Octave Band Result — Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date12-09-2019
Tags
DVIA-M Series
Installation Report
Hugong Heavy Machinery
ZEISS
EVO18
DVIA-MB1000
MB1000
P125
190531R4
FIBERHOME
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