Handu Package MO1000 P20 vibration survey — Hirox microscope (Incheon Namdong)

DVIA-M Series

Installation Report

Handu Package

Hirox

Incheon

MO1000

DVIA-M1000

DVIA-ML1000

Handu Package

Trip date

2019.10.25 (Fri)

Report date

2019.10.28 (Mon)

Engineer

Choi, Sungwon (Manager)

Overview

After installation of the vibration isolation table, the vibration environment was measured to verify there are no issues for equipment operation.

Measurement date: 2019. 10. 25 (Fri), operator: DAEIL SYSTEMS Manager Sungwon Choi

Measurement site: Handu Package, Incheon Namdong Industrial Complex

Equipment model: Hirox microscope

Measurement conditions and results

Measurement conditions: the MO1000 top plate and the building floor were measured.

Measurement result summary

	Z	X	Y
Floor	B	C	C
Isolation table top	F	G	F

Remarks

One of four isolation units was adjusted too high and caught on the stopper; after readjustment it operated normally.

One of four units had its cover assembled; with the cover fitted, the cover could contact the top plate and transmit vibration. The cover was removed due to this concern.

Isolation performance is favorable in all directions.

Vibration level on the isolation table top is favorable at Class F.

Vibration environment VC-CLASS graphs

Vertical axis (Z) vibration level

Horizontal axis (X) vibration level

Horizontal axis (Y) vibration level

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A